Patents by Inventor Frank Balma

Frank Balma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer heater with protected heater element
    Publication number: 20040250774
    Abstract: The present invention satisfies this and other needs by providing a novel wafer heater, which isolates a heater element from the vacuum environment. Thus, a non-aluminum heater element can be used in a wafer heater of the current invention. The novel wafer heater of the invention has an interface with high vacuum integrity, minimal dead space and reduced potential for vacuum contamination.
    Type: Application
    Filed: June 16, 2003
    Publication date: December 16, 2004
    Inventors: Brent Elliot, Frank Balma