Patents by Inventor Frank Bernard Alexander, Jr.

Frank Bernard Alexander, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radial flow reactor including glow discharge limiting shield
    Patent number: 4033287
    Abstract: An improved radio frequency (rf) powered radial flow cylindrical reactor utilizes a gas shield which substantially limits the glow plasma discharge reaction to a section of the reactor over the semiconductor substrates which are to be coated. The gas shield permits the use of higher rf input power which contributes to the formation of protective films that have desirable physical and electrical characteristics.
    Type: Grant
    Filed: January 22, 1976
    Date of Patent: July 5, 1977
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventors: Frank Bernard Alexander, Jr., Cesar Deduyo Capio, Victor Emerald Hauser, Jr., Hyman Joseph Levinstein, Cyril Joseph Mogab, Ashok Kumar Sinha, Richard Siegfried Wagner