Abstract: The invention relates Tunable prism (1) for optical image stabilization, comprising the components: A container (2) that comprises a membrane (6) comprising at least a transparent portion, the container (2) further comprising a transparent rigid bottom portion (5) facing the membrane (6), wherein the membrane (6) is connected to the bottom portion (5), and wherein the container (2) encloses a volume (7) that is filled with a transparent fluid (3); A transparent window (8) arranged on the membrane (6), wherein the membrane (6) comprises a deformable portion (6a) extending around an outer edge (8a) of the window (8), such that the window (8) can be tilted around a first and/or a second axis (201, 202) with respect to the bottom portion (5). The invention further relates to an imaging system (50) comprising the tunable prism (1).

Abstract: The present invention relates to an optical device (1), comprising: a tunable lens (2) having a tunable optical power, and a lens barrel (3) extending along a central axis (z), the lens barrel (3) comprising a circumferential lateral wall (30) surrounding an internal space (31) of the lens barrel (3) for accommodating the tunable lens (2), wherein the tunable lens (2) is carried by the lens barrel (3) and is at least partially arranged in the internal space (31) of the lens barrel (3) at a height (h) with respect to the central axis (z), wherein the lens barrel (2) comprises a first cross-sectional plane (A) and a second cross-sectional plane (B), said cross sectional planes (A, B) intersecting each other along the central axis (z), wherein the lens barrel (3) comprises at said height (h) of the tunable lens (2) a first diameter (D1) extending along the first cross-sectional plane (A) and a second diameter (D2) extending along the second cross-sectional plane (B), wherein the first diameter (D1) is smaller th

Abstract: Optical element (1) comprising a sealed volume (15), a first window (11), a second window (12) and a membrane (13), wherein the membrane (13) encloses the sealed volume (15) in lateral directions and the membrane (13) encloses the sealed volume (15) in directions perpendicular to lateral directions, or the first window (11) and the second window (12) enclose the sealed volume (15) in directions perpendicular to lateral directions, wherein the sealed volume (15) is deformable by tilting the first window (11) with respect to the second window (12), wherein the first window (11) and the second window (12) being spaced apart by a solid structure (14), and the solid structure (14) is arranged to guide a motion of the first window (11) with respect to the second window (12), so that a pressure in the sealed volume (15) is constant.

Abstract: Objective comprising a lens barrel, an actuator and a tunable lens, wherein the tunable lens comprises a primary membrane and a secondary membrane delimiting a liquid volume on opposing sides along an axial direction, the tunable lens comprises a container delimiting the liquid volume in lateral directions, wherein the lateral directions extend perpendicularly with respect to the axial direction, and the primary membrane and the secondary membrane are attached to opposing sides of the container, the tunable lens comprises a window member which is attached to the secondary membrane, wherein the secondary membrane connects the window member and the container elastically, wherein relative motion of the window member and the container along the axial direction results in a change of an optical property of the tunable lens, the window member or the container is fixedly attached to the lens barrel, the actuator is arranged to provide an actuation force along the axial direction, wherein the actuation force acts bet

Abstract: Optical zoom system comprising an image sensor, an objective having multiple refractive surfaces and a focus tunable lens which has a tunable optical power, an expansion unit which is arranged to alter a total track length, wherein in the total track length is measured from a first refractive surface of the objective to the image sensor along the optical path.

Abstract: Tunable liquid lens (100) comprising a container (5) delimiting a volume (50), wherein the volume (50) comprises a first liquid (1) and a second liquid (2), a first interface (12) is formed between the first liquid (1) and the second liquid (2), wherein the first liquid (1) and the second liquid (2) are immediately adjacent, a second interface (23) is formed between the second liquid (2) and a third liquid (3), wherein the second liquid (2) and the third liquid (3) are immediately adjacent or the second liquid (2) and the third liquid (3) are adjacent to opposite sides of a membrane (30), the optical power of the lens (100) is adjustable by altering the curvature of the first interface (12) and/or the second interface (23), and the refractive indices and the mass densities of the first liquid (1), the second liquid (2) and the third liquid (3) and the stiffness of the membrane (30) are adjusted to compensate for coma induced by acceleration forces (99).

Abstract: The invention relates Tunable prism (1) for optical image stabilization, comprising the components: —A container (2) that comprises a membrane (6) comprising at least a transparent portion, the container (2) further comprising a transparent rigid bottom portion (5) facing the membrane (6), wherein the membrane (6) is connected to the bottom portion (5), and wherein the container (2) encloses a volume (7) that is filled with a transparent fluid (3), —A transparent window (8) arranged on the membrane (6), wherein the membrane (6) comprises a deformable portion (6a) extending around an outer edge (8a) of the window (8), such that the window (8) can be tilted around a first and/or a second axis (201, 202) with respect to the bottom portion (5). The invention further relates to an imaging system (50) comprising the tunable prism (1).

Abstract: The present invention relates to an optical device (1), comprising a lens (10) having an adjustable focal length, the lens (10) comprising a container (11) that encloses a lens volume (V) and a reservoir volume (R) that is connected to the lens volume (V), wherein the two volumes (R, V) are filled with a transparent liquid (L), wherein the container (11) further comprises a flat lateral wall structure (12) having a front side (12a) and a back side (12b), an elastically deformable and transparent membrane (20), a transparent cover element (30), and an elastically deformable wall portion (22), wherein the membrane (20) is connected to the back side (12b) of the lateral wall structure (12), wherein the cover element (30) is connected to the front side (12a) of the lateral wall structure (12) such that the lens volume (V) is arranged between the cover element (30) and the membrane (20), and wherein the wall portion (22) is arranged adjacent the reservoir volume (R), and wherein the wall portion (R) comprises an i

Abstract: The present invention relates to an optical zoom device (1), comprising: a first lens (31) having an adjustable focal length and comprising a container (41) filled with a transparent fluid (F), wherein the container (41) of the first lens (31) comprises an elastically deformable and transparent membrane (61) facing a transparent wall (21) of the container (41) of the first lens (31), a second lens (32) having an adjustable focal length, wherein the second lens (32) is arranged after the first lens (31) in an optical path (A) of the optical zoom device (1), wherein the second lens (32) comprises a container (42) filled with a transparent fluid (F), wherein the container (42) of the second lens (32) comprises an elastically deformable and transparent membrane (62) facing a transparent wall (22) of the container (42) of the second lens (32), and a light deflecting device (70) arranged in the optical path (A), wherein the second lens (32) is arranged after the light deflecting device (70) in the optical path (A).

Abstract: The present invention relates to a tunable prism for deflecting light incident on the tunable prism in a variable fashion, wherein the tunable prism comprises: a member comprising a transparent and flexible first surface, a transparent and flexible second surface that faces away from the first surface, and an optical medium arranged between the two surfaces, such that light (L) incident on the first surface passes through the optical medium and exits the member via the second surface, whereby the light (L) is deflected by the member depending on an angle (W) between the two surfaces, a rigid first optical element comprising a surface area connected to the first surface, a rigid second optical element comprising a surface area connected to the second surface, and an actuator system configured to tilt the first optical element and/or the second optical element to tune said angle.

Abstract: A fluid delivery apparatus and method for use in a chemical mechanical polishing system is provided. The delivery rate of a fluid onto a pad is controlled to reduce the consumption of the fluid. In general, the fluid flow may be varied between a relatively lower flow rate and a relatively higher flow rate or, alternatively, the flow may be periodically terminated. Fluid flow may be controlled by any combination of pumps, controllers, valves, or other regulator/fluid flow control member.

Abstract: Configurations within the CMP carrier head to maintain a constant contact area through which a downward pressure can be applied and distributed to the substrate for ensuring the force pressing the substrate against the pad will remain steady for each application of pressure, and for repeated application of pressure over time.

Abstract: An apparatus for producing a plasma suitable for semiconductor processing at pressures in the low millitorr range. The apparatus includes a vacuum chamber with a dielectric window, a generally planar coil disposed adjacent the window outside the chamber and coupled to an appropriate power source, and a plasma initiator disposed within the chamber. Once the plasma is initiated, the planar coil sustains the plasma by inductive power coupling. In one embodiment the plasma initiator is a secondary electrode disposed within the chamber and coupled to a second RF power source. In an alternative embodiment both the secondary electrode and a target pedestal are coupled to the secondary RF power source through a power splitter. In an alternative embodiment, the plasma initiator is used to ionize a portion of the process gas and provide a plasma that may then inductively couple with the planar coil.

Abstract: An apparatus for producing a plasma suitable for semiconductor processing at pressures in the low millitorr range. The apparatus includes a vacuum chamber with a dielectric window, a generally planar coil disposed adjacent the window outside the chamber and coupled to an appropriate power source, and a plasma initiator disposed within the chamber. Once the plasma is initiated, the planar coil sustains the plasma by inductive power coupling. In one embodiment the plasma initiator is a secondary electrode disposed within the chamber and coupled to a second RF power source. In an alternative embodiment both the secondary electrode and a target pedestal are coupled to the secondary RF power source through a power splitter. In an alternative embodiment, the plasma initiator is used to ionize a portion of the process gas and provide a plasma that may then inductively couple with the planar coil.

Abstract: The present invention relates to a method for generating a low pressure plasma circulating in a planar direction within a process enclosure. The invention generates plasma having substantially uniform density characteristics across a planar axis. The invention achieves improved uniformity of the plasma density by delivering more radio frequency power toward the periphery of the circulating plasma than toward the center of the plasma. Increasing the periphery power to the circulating plasma compensates for increased plasma losses due to interaction with the side walls of the process containment enclosure.

Abstract: The present invention relates to a system and method for control and delivery of radio frequency power in plasma process systems. The present invention monitors the power, voltage, current, phase, impedance, harmonic content and direct current bias of the radio frequency energy being delivered to the plasma chamber. In addition, the plasma mode of operation may be controlled by creating either a capacitively or inductively biased radio frequency source impedance. A radio frequency circulator prevents reflected power from the plasma chamber electrode to damage the power source and it further dissipates the reflected power in a termination resistor. The termination resistor connected to the circulator also effectively terminates harmonic energy caused by the plasma non-linearities. Multiple plasma chamber electrodes and radio frequency power sources may be similarly controlled.

Abstract: Dynamic control and delivery of radio frequency power in plasma process systems is utilized to enhance the repeatability and uniformity of the process plasma. Power, voltage, current, phase, impedance, harmonic content and direct current bias of the radio frequency energy being delivered to the plasma chamber may be monitored at the plasma chamber and used to control or characterize the plasma load. Dynamic pro-active control of the characteristics of the radio frequency power to the plasma chamber electrode during the formation of the plasma enhances the uniformity of the plasma for more exact and controllable processing of the work pieces.

Abstract: An apparatus for producing a plasma suitable for semiconductor processing at pressures in the low millitorr range. The apparatus includes a vacuum chamber with a dielectric window, a generally planar coil disposed adjacent the window outside the chamber and coupled to an appropriate power source, and a plasma initiator disposed within the chamber. Once the plasma is initiated, the planar coil sustains the plasma by inductive power coupling. In one embodiment the plasma initiator is a secondary electrode disposed within the chamber and coupled to a second RF power source. In an alternative embodiment both the secondary electrode and a target pedestal are coupled to the secondary RE power source through a power splitter. In an alternative embodiment, the plasma initiator is used to ionize a portion of the process gas and provide a plasma that may then inductively couple with the planar coil.

Abstract: The present invention relates to a system and method for detecting the end-point of a layer being removed from a semiconductor wafer by a plasma etching system. The invention determines end-point by referencing first and second positions of matching components of a matching network between a radio frequency source and the plasma etching system chamber. Comparison of a first position representative of chamber load impedance before end-point, and a second position representative of a change in chamber load impedance is utilized to determine end point.

Abstract: The present invention relates to an apparatus for generating a low pressure plasma circulating in a planar direction within a process enclosure. The invention generates plasma having substantially uniform density characteristics across a planar axis. The invention achieves improved uniformity of the plasma density by delivering more radio frequency power toward the periphery of the circulating plasma than toward the center of the plasma. Increasing the periphery power to the circulating plasma compensates for increased plasma losses due to interaction with the side walls of the process containment enclosure.