Abstract: A lithographic apparatus arranged to transfer a pattern onto a substrate is disclosed. The lithographic apparatus comprises a power supply and an electrical connector. The electrical connector electrically connects the power supply to another component of the lithographic apparatus. The electrical connector comprises a laminate that comprises, in order, a first conducting layer, a first flexible insulating layer, a conductor configured to carry an electrical current, a second flexible insulating layer and a second conducting layer.

Abstract: A system and method allow for a more effective and efficient patterning device architecture and control arrangement. A lithography apparatus comprises an illumination system, a patterning device, and a projection system. The illumination system is configured to condition a beam of radiation. The patterning device is configured to pattern the beam of radiation. The patterning device comprises a control system and an array of individually controllable elements. The control system is configured to convert analog signals having respective first voltage values to corresponding differential control signals having second, higher voltage values. Corresponding ones of the individually controllable elements in the array of individually controllable elements are configured to actuate based on receiving a corresponding one of the differential control signals. The projection system is configured to project the patterned beam onto a target area of a substrate.

Abstract: A system and method allow for a more effective and efficient patterning device architecture and control arrangement. A lithography apparatus comprises an illumination system, a patterning device, and a projection system. The illumination system is configured to condition a beam of radiation. The patterning device is configured to pattern the beam of radiation. The patterning device comprises a control system and an array of individually controllable elements. The control system is configured to convert analog signals having respective first voltage values to corresponding differential control signals having second, higher voltage values. Corresponding ones of the individually controllable elements in the array of individually controllable elements are configured to actuate based on receiving a corresponding one of the differential control signals. The projection system is configured to project the patterned beam onto a target area of a substrate.

Abstract: A high performance magnetic tape transport and tape cartridge. The cartridge includes coplanar hubs carrying tape rolls on fixed axes, a brake system which urges each hub in a direction to tension the tape when the cartridge is removed from the transport, and a pair of doors which completely enclose the front face of the cartridge when the cartridge is out of the transport and automatically open to expose the entire front face of the cartridge when it is inserted in the transport. The transport includes a pair of capstans, each mounted on its own carriage assembly with its own drive motor. The capstans have a high friction surface. The carriage assemblies are spring biased with equal force toward the front of the cartridge. When the cartridge is inserted in the transport, the capstans drivingly engage the peripheries of the tape rolls, and magnetic transducer heads in the transport engage the front face of a span of tape between the rolls.