Patents by Inventor Frank E. Kretz

Frank E. Kretz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detection and handling of semiconductor wafers and wafers-like objects
    Patent number: 7144056
    Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
    Type: Grant
    Filed: March 25, 2003
    Date of Patent: December 5, 2006
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
  • Detection and handling of semiconductor wafers and wafer-like objects
    Patent number: 7104579
    Abstract: An end effector has one or more vortex chucks to support a wafer, and at least two detectors for detecting different portions of the wafer before the wafer is picked up. If one of the detectors detects a wafer and the other one does not, an alarm is generated to alert an operator that the wafer is possibly cross slotted in the wafer cassette. Each detector includes a light emitter and a light receiver. The light emitter emits a light beam at an angle to a surface defined by an ideally flat wafer when the wafer is supported by the end effector (the actual wafers do not have to be flat). The angle is not more than 45°, and is between 6° and 12° in some embodiments. Other features and embodiments are also provided.
    Type: Grant
    Filed: January 12, 2004
    Date of Patent: September 12, 2006
    Assignee: Tru-Si Technologies Inc.
    Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
  • Alignment of semiconductor wafers and other articles
    Patent number: 7052229
    Abstract: A wafer or some other article is aligned while being held by an end-effector.
    Type: Grant
    Filed: June 9, 2004
    Date of Patent: May 30, 2006
    Assignee: Tru-Si Technologies Inc.
    Inventors: Alexander J. Berger, Frank E. Kretz
  • Article holders with sensors detecting a type of article held by the holder
    Patent number: 7027894
    Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
    Type: Grant
    Filed: September 9, 2003
    Date of Patent: April 11, 2006
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
  • Alignment of semiconductor wafers and other articles
    Patent number: 6948898
    Abstract: A wafer or some other article is aligned while being held by an end-effector.
    Type: Grant
    Filed: October 15, 2002
    Date of Patent: September 27, 2005
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Alexander J. Berger, Frank E. Kretz
  • Alignment of semiconductor wafers and other articles
    Patent number: 6935830
    Abstract: A wafer or some other article is aligned while being held by an end-effector.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: August 30, 2005
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Alexander J. Berger, Frank E. Kretz
  • Detection and handling of semiconductor wafers and wafer-like objects
    Publication number: 20040150237
    Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
    Type: Application
    Filed: January 12, 2004
    Publication date: August 5, 2004
    Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
  • Article holders with sensors detecting a type of article held by the holder
    Publication number: 20040049318
    Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
    Type: Application
    Filed: September 9, 2003
    Publication date: March 11, 2004
    Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
  • Detection and handling of semiconductor wafers and wafer-like objects
    Patent number: 6688662
    Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
    Type: Grant
    Filed: April 2, 2002
    Date of Patent: February 10, 2004
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
  • Detection and handling of semiconductor wafers and wafers-like objects
    Publication number: 20040012214
    Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
    Type: Application
    Filed: March 25, 2003
    Publication date: January 22, 2004
    Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
  • Article holders with sensors detecting a type of article held by the holder
    Patent number: 6665583
    Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
    Type: Grant
    Filed: October 4, 2002
    Date of Patent: December 16, 2003
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
  • Article holders and article positioning methods
    Patent number: 6638004
    Abstract: An article holder has protrusions that contact the article. The friction between the protrusions and the article impedes the article movement relative to the holder yet allows the article to slide when the article is pushed against some object. The article is pushed against the object in order to position the article more precisely.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: October 28, 2003
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Alexander J. Berger, Frank E. Kretz, Sean A. Casarotti
  • Detection and handling of semiconductor wafer and wafer-like objects
    Patent number: 6631935
    Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
    Type: Grant
    Filed: August 4, 2000
    Date of Patent: October 14, 2003
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
  • Articles holders with sensors detecting a type of article held by the holder
    Patent number: 6615113
    Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: September 2, 2003
    Assignee: Tru-Si Technologies, Inc.
    Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
  • Detection and handling of semiconductor wafers and wafer-like objects
    Publication number: 20030052495
    Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
    Type: Application
    Filed: April 2, 2002
    Publication date: March 20, 2003
    Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
  • Article holders with sensors detecting a type of article held by the holder
    Publication number: 20030040837
    Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
    Type: Application
    Filed: October 4, 2002
    Publication date: February 27, 2003
    Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
  • Alignment of semiconductor wafers and other articles
    Publication number: 20030031549
    Abstract: A wafer or some other article is aligned while being held by an end-effector.
    Type: Application
    Filed: October 15, 2002
    Publication date: February 13, 2003
    Inventors: Alexander J. Berger, Frank E. Kretz
  • Articles holders with sensors detecting a type of article held by the holder
    Publication number: 20030018410
    Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
    Type: Application
    Filed: July 13, 2001
    Publication date: January 23, 2003
    Applicant: Tru-Si Technologies, Inc.
    Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
  • Article holders and article positioning methods
    Publication number: 20030012638
    Abstract: An article holder has protrusions that contact the article. The friction between the protrusions and the article impedes the article movement relative to the holder yet allows the article to slide when the article is pushed against some object. The article is pushed against the object in order to position the article more precisely.
    Type: Application
    Filed: July 13, 2001
    Publication date: January 16, 2003
    Inventors: Alexander J. Berger, Frank E. Kretz, Sean A. Casarotti
  • Alignment of semiconductor wafers and other articles
    Publication number: 20030014158
    Abstract: A wafer or some other article is aligned while being held by an end-effector.
    Type: Application
    Filed: July 13, 2001
    Publication date: January 16, 2003
    Applicant: Tru-Si Technologies, Inc.
    Inventors: Alexander J. Berger, Frank E. Kretz