Abstract: A Mirau interference objective includes an objective lens and a splitter element arranged between the objective lens and an object to be examined. The splitter element is configured to split an incident light beam into a sample beam path and a reference beam path. The objective lens is configured to focus the sample beam path on the object to be examined. A mirror element is arranged between the splitter element and the objective lens. The mirror element is configured to reflect the reference beam path. A phase shift compensating element is configured to compensate for a wavelength-dependent phase shift between the reference beam path and the sample beam path which is superposed on the reference beam path.

Abstract: A Mirau interference objective includes an objective lens and a splitter element arranged between the objective lens and an object to be examined. The splitter element is configured to split an incident light beam into a sample beam path and a reference beam path. The objective lens is configured to focus the sample beam path on the object to be examined. A mirror element is arranged between the splitter element and the objective lens. The mirror element is configured to reflect the reference beam path. A phase shift compensating element is configured to compensate for a wavelength-dependent phase shift between the reference beam path and the sample beam path which is superposed on the reference beam path.

Abstract: The present invention relates to a glass plate (2) for use in a device (1) for stretching sample sections having a sectioning knife, the glass plate (2) being arranged at the back (3) of the sectioning knife in such a way that a defined gap (4) for reception of the sectioned sample is formed between the back (3) of the sectioning knife and the plate (2), the glass plate (2) possessing, at least on one of its longitudinal sides (21, 22), edges (211, 212; 221, 222) ground and polished to optical flatness.

Abstract: An optical element for distributing light has a predefined spectral energy distribution in a predetermined working wavelength range. The optical element encompasses a transparent body into which the light enters, and a beam splitter layer embodied inside the transparent body, which layer has in the working wavelength range a predefined wavelength-dependent reflectance with which it reflects the light entering the transparent body in order to generate a reflected exit light bundle, and a wavelength-dependent transmittance with which it transmits the light entering the transparent body to generate a transmitted exit light bundle. The optical element encompasses a compensation layer arrangement, embodied on the transparent body separately from the beam splitter layer, whose transmittance with regard to the light passing through the compensation layer arrangement is defined as a function of the reflectance and transmittance of the beam splitter layer.

Abstract: The present invention relates to a glass plate (2) for use in a device (1) for stretching sample sections having a sectioning knife, the glass plate (2) being arranged at the back (3) of the sectioning knife in such a way that a defined gap (4) for reception of the sectioned sample is formed between the back (3) of the sectioning knife and the plate (2), the glass plate (2) possessing, at least on one of its longitudinal sides (21, 22), edges (211, 212; 221, 222) ground and polished to optical flatness.

Abstract: An optical element (10, 50, 60) encompasses a transparent body (12) and a beam splitter layer (18) embodied inside the transparent body (12), which layer has in a working wavelength range a predefined wavelength-dependent reflectance with which it reflects the light entering the transparent body (12), and a wavelength-dependent transmittance with which it transmits the light entering the transparent body (12). The optical element (10, 50, 60) further encompasses a compensation layer arrangement (28, 30, 52, 54), whose transmittance with regard to the light passing through the compensation layer arrangement (28, 30, 52, 54) is defined in such a way that the reflected exit light bundle and the transmitted exit light bundle have matching spectral energy distributions.

Abstract: A deposition apparatus and methods for controlling an actuator and a heating system in a deposition apparatus are proposed. The deposition apparatus comprises a deposition chamber and at least one substrate holder movably arranged within the deposition chamber for holding substrates to be coated. The deposition apparatus shall further comprise radio equipment having at least a first radio device which is connected to the substrate holder and a second radio device which is arranged at least partially outside the deposition chamber. Between the first radio device and the second radio device a radio link is to be established at least temporarily for transferring information.

Abstract: A microscope (10) is disclosed, having a revolving nosepiece (12) on which are mounted multiple objectives. The objectives (11) comprise multiple components 211, . . . 21n). A light-intensity-reducing layer (40) is applied onto at least one component of an objective. The light-intensity-reducing layer (40) is configured in such a way that for each objective introduced into the illumination beam path, the brightness behind it is of the same magnitude.

Abstract: An inspection microscope for several wavelength ranges with at least one illuminating beam path and at least one imaging beam path. Those optical elements in the illuminating beam path and in the imaging beam path, through which beams of all wavelengths pass, are provided with a reflection-reducing layer, by means of which the wavelength ranges with reduced reflection are the visible VIS-wavelength range up to 650 nm, the i-lines at ?=365 nm and the ultraviolet DUV-wavelength range from 240 nm to 270 nm. The reflection-reducing layer is a sandwich structure, comprising various material combinations, such as for example, M2/MgF2 or M2/MgF2/SiO2 or M2/MgF2/Al2O3, where M2 is a mixed substance from the company Merck, comprising Al2O3. The optical components with reduced reflectance preferably comprise quartz glass or CaF2.

Abstract: A microscope (10) is disclosed, having a revolving nosepiece (12) on which are mounted multiple objectives. The objectives (11) comprise multiple components 211, . . . 21n). A light-intensity-reducing layer (40) is applied onto at least one component of an objective. The light-intensity-reducing layer (40) is configured in such a way that for each objective introduced into the illumination beam path, the brightness behind it is of the same magnitude.

Abstract: The invention relates to an absorbent thin-film system made up of alternate metal and dielectric layers. With this system, color-neutral absorption results in the visual spectral region are obtained, as are a defined phase shift and a defined transmission. This film system is used for contrasting methods or contrasting systems in microscopy.

Abstract: An illumination device for a DUV microscope has an illumination beam path, proceeding from a DUV light source in which are arranged a condenser and a reflection filter system which generates a DUV wavelength band and comprises four reflection filters. At these, the illumination beam is reflected in each case at the same reflection angle &agr;, the illumination beam path extending coaxially in front of and behind the reflection filter system. According to the present invention, the reflection angle &agr;=30° and the DUV wavelength band &lgr;DUV+&Dgr;&lgr; has a half-value width of max. 20 nm and a peak with a maximum value S of more than 90% of the incoming light intensity. The resulting very narrow half-value width of the DUV wavelength band makes it possible for the DUV objectives of the DUV microscope to be very well-corrected.