Patents by Inventor Frank Goerbing

Frank Goerbing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion source devices and methods
    Patent number: 10068743
    Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.
    Type: Grant
    Filed: December 7, 2015
    Date of Patent: September 4, 2018
    Assignee: Infineon Technologies AG
    Inventor: Frank Goerbing
  • ION SOURCE DEVICES AND METHODS
    Publication number: 20160086763
    Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.
    Type: Application
    Filed: December 7, 2015
    Publication date: March 24, 2016
    Inventor: Frank GOERBING
  • Ion source devices and methods
    Patent number: 9257285
    Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: February 9, 2016
    Assignee: INFINEON TECHNOLOGIES AG
    Inventor: Frank Goerbing
  • ION SOURCE DEVICES AND METHODS
    Publication number: 20140055024
    Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.
    Type: Application
    Filed: August 22, 2012
    Publication date: February 27, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventor: Frank Goerbing