Abstract: Evaluation arrangement for a thermal gas sensor with at least one heater and at least one detector. The evaluation arrangement is configured to obtain information about an amplitude of a detector signal of a first detector, and information about a first phase difference between a heater signal and the detector signal of the first detector. In addition, the evaluation arrangement is configured to form as an intermediate quantity, dependent on the information about the amplitudes of the detector signal and dependent on the information about the first phase difference, a combination signal, and to determine information about a gas concentration or information about a thermal diffusivity of a fluid on the basis of the combination signal.

Abstract: A sensor arrangement having: a first sensor cell which can be excited thermally by means of a heater; a second sensor cell which can be excited thermally by means of a heater; and an evaluation; wherein the first and second sensor cells are sensor cells of the same kind and are dimensioned and/or configured differently, and are configured to form a respective oscillation behavior in dependence on a gas property of a gas surrounding the sensor cells, in particular heat conductivity, volume heat capacity, temperature and/or pressure, and the evaluation is configured to evaluate the oscillation behavior of the first and second sensor cells together in order to determine the heat conductivity and volume heat capacity, heat conductivity being determined based on the oscillation behavior of the first sensor cell and volume heat capacity being determined based on the oscillation behavior of the second sensor cell.

Abstract: A sensor arrangement having at least one sensor cell and an evaluation, wherein the at least one sensor cell can be excited thermally by means of a heater; wherein the sensor cell is configured to form an oscillation behavior in dependence on a gas property of a gas surrounding the sensor cell, in particular heat conductivity, volume heat capacity, temperature and/or pressure, and is excited by means of an excitation frequency, and wherein a first excitation frequency or a first evaluation frequency is used for a first measurement, and wherein a second excitation frequency or evaluation frequency is used for a second measurement, wherein the first excitation frequency differs from the second excitation frequency, or wherein the first evaluation frequency differs from the second evaluation frequency; and wherein the evaluation is configured to determine heat conductivity based on the first measurement and volume heat capacity based on the second measurement.

Abstract: In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate. In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor.

Abstract: Evaluation arrangement for a thermal gas sensor with at least one heater and at least one detector. The evaluation arrangement is configured to obtain information about an amplitude of a detector signal of a first detector, and information about a first phase difference between a heater signal and the detector signal of the first detector. In addition, the evaluation arrangement is configured to form as an intermediate quantity, dependent on the information about the amplitudes of the detector signal and dependent on the information about the first phase difference, a combination signal, and to determine information about a gas concentration or information about a thermal diffusivity of a fluid on the basis of the combination signal.

Abstract: Evaluation arrangement for a thermal gas sensor with at least one heater and at least one detector. The evaluation arrangement is configured to obtain information about an amplitude of a detector signal of a first detector, and information about a first phase difference between a heater signal and the detector signal of the first detector. In addition, the evaluation arrangement is configured to form as an intermediate quantity, dependent on the information about the amplitudes of the detector signal and dependent on the information about the first phase difference, a combination signal, and to determine information about a gas concentration or information about a thermal diffusivity of a fluid on the basis of the combination signal.

Abstract: Evaluation arrangement for a thermal gas sensor with at least one heater and at least one detector. The evaluation arrangement is configured to obtain information about an amplitude of a detector signal of a first detector, and information about a first phase difference between a heater signal and the detector signal of the first detector. In addition, the evaluation arrangement is configured to form as an intermediate quantity, dependent on the information about the amplitudes of the detector signal and dependent on the information about the first phase difference, a combination signal, and to determine information about a gas concentration or information about a thermal diffusivity of a fluid on the basis of the combination signal.

Abstract: Evaluation arrangement for a thermal gas sensor with at least one heater and at least one detector. The evaluation arrangement is configured to obtain information about an amplitude of a detector signal of a first detector, and information about a first phase difference between a heater signal and the detector signal of the first detector. In addition, the evaluation arrangement is configured to form as an intermediate quantity, dependent on the information about the amplitudes of the detector signal and dependent on the information about the first phase difference, a combination signal, and to determine information about a gas concentration or information about a thermal diffusivity of a fluid on the basis of the combination signal.

Abstract: Gas sensor, including a membrane and a heating element arranged on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane. The first discontinuation area of the membrane includes at least one discontinuation of the membrane and the second discontinuation area of the membrane includes at least one discontinuation of the membrane. The gas sensor further includes a first temperature sensor structure arranged at least partially on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element, and a second temperature sensor structure arranged at least partially on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element.

Abstract: In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate. In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor.

Abstract: The invention relates to a sensor arrangement having a barometric pressure sensor and a thermal gas sensor, wherein the thermal gas sensor is arranged on the barometric pressure sensor or beside the barometric pressure sensor such that a gas-permeable measurement structure of the thermal gas sensor is arranged in front of a gas inlet opening of the barometric pressure sensor or in front of a pressure-sensitive surface of the barometric pressure sensor.

Abstract: Gas sensor, including a membrane and a heating element arranged on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane. The first discontinuation area of the membrane includes at least one discontinuation of the membrane and the second discontinuation area of the membrane includes at least one discontinuation of the membrane. The gas sensor further includes a first temperature sensor structure arranged at least partially on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element, and a second temperature sensor structure arranged at least partially on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element.

Abstract: Evaluation arrangement for a thermal gas sensor with at least one heater and at least one detector. The evaluation arrangement is configured to obtain information about an amplitude of a detector signal of a first detector, and information about a first phase difference between a heater signal and the detector signal of the first detector. In addition, the evaluation arrangement is configured to form as an intermediate quantity, dependent on the information about the amplitudes of the detector signal and dependent on the information about the first phase difference, a combination signal, and to determine information about a gas concentration or information about a thermal diffusivity of a fluid on the basis of the combination signal.

Abstract: The invention relates to a sensor arrangement having a barometric pressure sensor and a thermal gas sensor, wherein the thermal gas sensor is arranged on the barometric pressure sensor or beside the barometric pressure sensor such that a gas-permeable measurement structure of the thermal gas sensor is arranged in front of a gas inlet opening of the barometric pressure sensor or in front of a pressure-sensitive surface of the barometric pressure sensor.