Patents by Inventor Frank Hiltawski

Frank Hiltawski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for inspecting a disk-shaped object
    Patent number: 7426024
    Abstract: A system for inspecting a disc-shaped substrate 5 is disclosed. The system 100 is surrounded by a housing. A table 2 that is movable in at least an X-direction and a Y-direction and is borne by a mounting plate 22 is provided within the housing 50. The mounting plate 22 is vibration isolated in comparison to the housing 50. Equally, an exhaust unit 40 is provided beneath the mounting plate 22 and arranged at a distance from it. The exhaust unit 40 possesses an opening 36 for air entry. The opening 36 for air entry is provided in the exhaust unit between an end of the mounting plate 22 and a wall of the housing 50.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: September 16, 2008
    Assignee: Vistec Semiconductor Systems Jena GmbH
    Inventors: Magdalena I. Hiltawski, legal representative, Frank A. Hiltawski, legal representative, René Schenck, Knut Hiltawski
  • System for inspecting a disk-shaped object
    Publication number: 20070186699
    Abstract: A system for inspecting a disc-shaped substrate 32 is disclosed. The system 100 is surrounded by a housing. A table 2 that is movable in at least an X-direction and a Y-direction and is borne by a mounting plate 22 is provided within the housing 50. The mounting plate 22 is vibration isolated in comparison to the housing 50. Equally, an exhaust unit 40 is provided beneath the mounting plate 22 and arranged at a distance from it. The exhaust unit 40 possesses an opening 36 for air entry. The opening 36 for air entry is provided in the exhaust unit between an end of the mounting plate 22 and a wall of the housing 50.
    Type: Application
    Filed: December 22, 2005
    Publication date: August 16, 2007
    Applicant: Leica Microsystems Jena GmbH
    Inventors: Knut Hiltawski, Magdalena Hiltawski, Frank Hiltawski