Patents by Inventor Frank J. Dunn

Frank J. Dunn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for cleaning a bell jar in a barrel epitaxial reactor
    Publication number: 20040178176
    Abstract: An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to the reaction chamber, and a blower power source for controlling the speed of the blower.
    Type: Application
    Filed: March 30, 2004
    Publication date: September 16, 2004
    Inventor: Frank J. Dunn
  • Apparatus and method for cleaning a bell jar in a barrel epitaxial reactor
    Patent number: 6738683
    Abstract: An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to the reaction chamber, and a blower power source for controlling the speed of the blower.
    Type: Grant
    Filed: September 5, 2000
    Date of Patent: May 18, 2004
    Assignee: CXE Equipment Services, LLC
    Inventor: Frank J. Dunn