Abstract: A device for the turning of flat articles, particularly blanks of folded boxes, includes conveying elements which define at least two conveying sections that are permeable to air and on which the articles are conveyed lying substantially flat, the conveying elements being mounted in a frame, a suction device arranged below the conveying element and to extend through the conveying section to increase the friction between the conveying elements and the articles, and a separate drive for each of the conveying elements of the respective conveying sections. The frame is mounted such that it can swivel about a pivot in the exit region of the frame relative to a machine frame.

Abstract: A folded box gluing machine for the processing of folded box blanks includes at least one feeder unit arranged to transport the folded box blanks to downstream processing stations including a folding station, a glue applicator unit, a transfer station, a gathering and pressing mechanism, and a safety mechanism for a machine component presenting a danger to the human operator defined by a light curtain. The safety mechanism can be deactivated via a mobile operator unit, and the operator unit is designed such that it can only be operated with both hands.

Abstract: A device for the turning of flat articles, particularly blanks of folded boxes, includes conveying elements which define at least two conveying sections that are permeable to air and on which the articles are conveyed lying substantially flat, the conveying elements being mounted in a frame, a suction device arranged below the conveying element and to extend through the conveying section to increase the friction between the conveying elements and the articles, and a separate drive for each of the conveying elements of the respective conveying sections. The frame is mounted such that it can swivel about a pivot in the exit region of the frame relative to a machine frame.

Abstract: A folded box gluing machine for the processing of folded box blanks includes at least one feeder unit arranged to transport the folded box blanks to downstream processing stations including a folding station, a glue applicator unit, a transfer station, a gathering and pressing mechanism, and a safety mechanism for a machine component presenting a danger to the human operator defined by a light curtain. The safety mechanism can be deactivated via a mobile operator unit, and the operator unit is designed such that it can only be operated with both hands.

Abstract: The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.

Abstract: An inductively heated trap for treating and removing compounds from an exhaust stream. More particularly, a method and apparatus for inductively heating a trap installed in the exhaust stream of a semiconductor process, wherein the trap decomposes exhaust gas compounds prior to entering a vacuum exhaust pump. The trap treats precursor compounds, such as metal organic and halide compounds, by thermally radicalizing the precursor vapors prior to entering the vacuum pump. The trap may be used in a variety of applications including atomic layer deposition, chemical vapor deposition and perfluorocarbon abatement.

Abstract: The present invention relates to a system and method for the recycling of sulfur hexafluoride (SF6), from a waste gas of a manufacturing process, such as a semiconductor processing method. In particular, the present invention provides a simplified system and method that utilizes additional SF6 as a purge gas for the system pump and allows relatively easy separation of the SF6 from the other waste gas components.

Abstract: The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.

Abstract: A method an apparatus is described using atomic layer deposition to form a barrier layer onto a substrate. The coated substrate exhibits reduced permeation to oxygen and water vapor.

Abstract: A trap with a residence time at least equal to one complete cycle time of an atomic layer deposition (ALD) process traps the gaseous effluent from a reaction chamber and reaction products before the effluent can enter a backing pump. The trap may be connected directly to the reaction chamber or indirectly through a process pump. The trap is advantageously used in atomic layer deposition processes.

Abstract: An atomic layer deposition apparatus and method is described in which precursor gas is delivered to a reactor chamber under a pressure gradient without pumping.

Abstract: An apparatus and method for processing a microelectronic substrate comprises a main chamber and a movable boundary. The main chamber comprises a main chamber wall enclosing a main chamber interior. The movable boundary is disposed within the main chamber interior, and is movable between a first position and a second position. At the first position, the movable boundary at least partially defines a sub-chamber in which a substrate can be processed. The sub-chamber is fluidly isolated from the main chamber interior, and provides an environment suitable for a high-pressure processing of the substrate such as cleaning or surface preparation. The sub-chamber can be maintained at a high pressure while the main chamber is maintained at either a low pressure, an atmospheric pressure, or at a vacuum. The apparatus can be directly coupled to an external substrate handling and/or fabrication module, such that the main chamber interior provides a buffer between the sub-chamber and the external module.

Abstract: A folding-box gluing or adhesive-bonding machine for producing folding boxes from blanks includes a folding station for folding parts of the blanks provided with a strip of adhesive. An adjoining transfer station includes at least two pairs of conveyor belts acting as a conveying device, a device for removing faulty folding boxes including a circular knife for cutting in a longitudinal conveying direction of the folding boxes and being lowered and lifted between the conveyor belts into and out of a conveying plane, and a device for laterally withdrawing side parts of the blanks severed by the longitudinal cut. The laterally withdrawing device has a flat rotary table outside and immediately adjacent one of the pairs of conveyor belts, an electric motor and at least two pressure disks. A collecting and pressing device presses the boxes having been folded flat, to set the adhesive.

Abstract: A folding-box gluing or adhesive-bonding machine for producing folding boxes from blanks includes a folding station for folding parts of the blanks provided with a strip of adhesive. An adjoining transfer station includes at least two pairs of conveyor belts acting as a conveying device, a device for removing faulty folding boxes including a circular knife for cutting in a longitudinal conveying direction of the folding boxes and being lowered and lifted between the conveyor belts into and out of a conveying plane, and a device for laterally withdrawing side parts of the blanks severed by the longitudinal cut. The laterally withdrawing device has a flat rotary table outside and immediately adjacent one of the pairs of conveyor belts, an electric motor and at least two pressure disks. A collecting and pressing device presses the boxes having been folded flat, to set the adhesive.

Abstract: An apparatus and method for processing a microelectronic substrate comprises a main chamber and a movable boundary. The main chamber comprises a main chamber wall enclosing a main chamber interior. The movable boundary is disposed within the main chamber interior, and is movable between a first position and a second position. At the first position, the movable boundary at least partially defines a sub-chamber in which a substrate can be processed. The sub-chamber is fluidly isolated from the main chamber interior, and provides an environment suitable for a high-pressure processing of the substrate such as cleaning or surface preparation. The sub-chamber can be maintained at a high pressure while the main chamber is maintained at either a low pressure, an atmospheric pressure, or at a vacuum. The apparatus can be directly coupled to an external substrate handling and/or fabrication module, such that the main chamber interior provides a buffer between the sub-chamber and the external module.

Abstract: A method and system are disclosed for plating objects. At least one aspect associated with the object plating is monitored to determine the amount of at least one byproduct created during the plating and/or the reduction in the amount of at least one plating component. Based on this monitored aspect, an adjustment is made to the flow rate of substances added to a plating cell and/or the flow rate of used plating substances drained from the plating cell. The used plating substances are purified to remove at least some of the byproduct and then the purified plating substances are combined with at least one component before passing back into the plating cell to reuse at least some of the plating substances. The method and system could be used during the plating of semiconductor wafers with copper.

Abstract: A method and system are disclosed for plating objects. At least one aspect associated with the object plating is monitored to determine the amount of at least one byproduct created during the plating and/or the reduction in the amount of at least one plating component. Based on this monitored aspect, an adjustment is made to the flow rate of substances added to a plating cell and/or the flow rate of used plating substances drained from the plating cell. The used plating substances are purified to remove at least some of the byproduct and then the purified plating substances are combined with at least one component before passing back into the plating cell to reuse at least some of the plating substances. The method and system could be used during the plating of semiconductor wafers with copper.

Abstract: A method and system are disclosed for plating objects. At least one aspect associated with the object plating is monitored to determine the amount of at least one byproduct created during the plating and/or the reduction in the amount of at least one plating component. Based on this monitored aspect, an adjustment is made to the flow rate of substances added to a plating cell and/or the flow rate of used plating substances drained from the plating cell. The used plating substances are purified to remove at least some of the byproduct and then the purified plating substances are combined with at least one component before passing back into the plating cell to reuse at least some of the plating substances. The method and system could be used during the plating of semiconductor wafers with copper.

Abstract: A method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined connection of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.

Abstract: A method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined concentration of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.