Patents by Inventor Frank Liucci

Frank Liucci has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and materials for depositing films on semiconductor substrates
    Patent number: 6500772
    Abstract: A method of depositing a film on a substrate, comprising placing the substrate in the presence of plasma energy, and contacting the substrate with a reactive gas component comprising a compound of the formula (R—NH)4−nSiXn, wherein R is an alkyl group, n is 1, 2, or 3, and X is selected from hydrogen or the halogens. The reactive gas composition may further comprise an oxidizer and/or a reducing agent.
    Type: Grant
    Filed: January 8, 2001
    Date of Patent: December 31, 2002
    Assignee: International Business Machines Corporation
    Inventors: Ashima B. Chakravarti, Richard A. Conti, Chester Dziobkowski, Thomas Ivers, Paul Jamison, Frank Liucci
  • Methods and materials for depositing films on semiconductor substrates
    Publication number: 20020090835
    Abstract: A method of depositing a film on a substrate, comprising placing the substrate in the presence of plasma energy, and contacting the substrate with a reactive gas component comprising a compound of the formula (R—NH)4−nSiXn, wherein R is an alkyl group, n is 1, 2, or 3, and X is selected from hydrogen or the halogens. The reactive gas composition may further comprise an oxidizer and/or a reducing agent.
    Type: Application
    Filed: January 8, 2001
    Publication date: July 11, 2002
    Inventors: Ashima B. Chakravarti, Richard A. Conti, Chester Dziobkowski, Thomas Ivers, Paul Jamison, Frank Liucci