Patents by Inventor Frank M. Schellenberg

Frank M. Schellenberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the repair of lithographic masks
    Patent number: 5686206
    Abstract: The present invention relates to a method for the repair of void type defects in phase-shifting optical lithography masks by depositing a transparent mateial on the defect from a gaseous precursor by ultraviolet beam-induced deposition.
    Type: Grant
    Filed: November 18, 1994
    Date of Patent: November 11, 1997
    Assignee: International Business Machines Corporation
    Inventors: Thomas Hall Baum, Paul Brian Comita, Frank M. Schellenberg