Patents by Inventor Frank Mehnke

Frank Mehnke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220406894
    Abstract: An exemplary embodiment of the present disclosure provides a method of fabricating a semiconductor device, comprising: providing a substrate, the substate comprising a base layer and two or more planar heteroepitaxial layers deposited on the base layer, the two or more heteroepitaxial layers comprising a first epitaxial layer having a first lattice constant and a second epitaxial layer having a second lattice constant different than the first lattice constant; etching the substrate to form one or more mesas; and depositing one or more non-planar overgrowth layers on the etched substrate.
    Type: Application
    Filed: June 9, 2022
    Publication date: December 22, 2022
    Inventors: Russell Dean Dupuis, Theeradetch Detchprohm, Frank Mehnke, Shyh-Chiang Shen