Patents by Inventor Frank Micelli

Frank Micelli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for removing a polishing pad from a platen
    Patent number: 6299519
    Abstract: An apparatus and method for removing a polishing pad from a platen during a CMP process is disclosed. The invention facilitates the removal of a polishing pad from a platen by providing a polishing pad having at least one protuberance portion extending from the main portion of the pad such that the polishing pad may be removed manually or with the assistance of a device by engaging the protuberance portion.
    Type: Grant
    Filed: August 3, 1999
    Date of Patent: October 9, 2001
    Assignee: Agere Systems Guardian Corp.
    Inventors: William G. Easter, John A. Maze, III, Frank Micelli
  • Magnetic force carrier and ring for a polishing apparatus
    Patent number: 6059638
    Abstract: The present invention provides a polishing apparatus having a drive motor, a carrier head and a polishing platen with a magnetic region formed in either the carrier head or the polishing platen. The magnetic region is configured to create an attracting force between the carrier head and the polishing platen. The drive motor is capable of producing a rotational polishing force. The carrier head is configured to retain an object to be polished, while the polishing platen has a polishing pad and is juxtaposed the carrier head.
    Type: Grant
    Filed: January 25, 1999
    Date of Patent: May 9, 2000
    Assignee: Lucent Technologies Inc.
    Inventors: Annette M. Crevasse, William G. Easter, John A. Maze, Frank Micelli, Jose O. Rodriguez