Patents by Inventor Frank-Michael Werner
Frank-Michael Werner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9983232Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.Type: GrantFiled: September 19, 2014Date of Patent: May 29, 2018Assignee: Cascade Microtech, Inc.Inventors: Frank-Michael Werner, Matthias Zieger, Sebastian Giessmann
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Publication number: 20150008948Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.Type: ApplicationFiled: September 19, 2014Publication date: January 8, 2015Inventors: Frank-Michael Werner, Matthias Zieger, Sebastian Giessmann
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Patent number: 8841932Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.Type: GrantFiled: April 26, 2011Date of Patent: September 23, 2014Assignee: Cascade Microtech, Inc.Inventors: Frank-Michael Werner, Matthias Zieger, Sebastian Giessmann
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Publication number: 20110316574Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.Type: ApplicationFiled: April 26, 2011Publication date: December 29, 2011Inventors: Frank-Michael WERNER, Matthias ZIEGER, Sebastian GIESSMANN
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Patent number: 7932737Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.Type: GrantFiled: December 30, 2008Date of Patent: April 26, 2011Assignee: Cascade Microtech, Inc.Inventors: Frank-Michael Werner, Matthias Zieger, Sebastian Giessmann
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Patent number: 7671615Abstract: In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.Type: GrantFiled: August 16, 2007Date of Patent: March 2, 2010Assignee: SUSS MicroTec Tech Systems GmbHInventors: Carel van de Beek, Stefan Kreissig, Volker Hansel, Sebastian Giessmann, Frank-Michael Werner, Claus Dietrich, Jorg Kiesewetter
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Publication number: 20090179658Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.Type: ApplicationFiled: December 30, 2008Publication date: July 16, 2009Applicant: SUSS MICROTEC TEST SYSTEMS GMBHInventors: Frank-Michael WERNER, Matthias ZIEGER, Sebastian GIESSMANN
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Publication number: 20080042679Abstract: In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.Type: ApplicationFiled: August 16, 2007Publication date: February 21, 2008Applicant: SUSS MicroTec Test Systems GmbHInventors: Carel van de Beek, Stefan Kreissig, Volker Hansel, Sebastian Giessmann, Frank-Michael Werner, Claus Dietrich, Jorg Kiesewetter
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Patent number: 7196507Abstract: An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.Type: GrantFiled: August 27, 2004Date of Patent: March 27, 2007Assignee: SUSS MicroTec Testsystems (GmbH)Inventors: Stefan Schneidewind, Claus Dietrich, Frank-Michael Werner, Don Feuerstein, Mike Lancaster, Denis Place
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Patent number: 7046025Abstract: A test apparatuss for testing substrates at low temperatures has a chuck, which can be displaced in the working area by means of a chuck drive, the temperature of which can be controlled using heating and cooling means. The chuck has a receiving surface for receiving a test substrate and holding means for fixing a substrate carrier which receives the test substrate. Spatially and thermally defined test conditions are maintained with minimal energy and labor costs both at room temperatures and at low temperatures. This is achieved by providing a vacuum chamber which surrounds the working area of the chuck. The chuck is on one side thermally decoupled from the uncooled chuck drive and on the other side is thermally connected in a releasable manner to the test substrate. The cooled chuck and the cooled test substrate are shielded from the thermal radiation of the surrounding uncooled assemblies by means of a directly cooled thermal radiation shield.Type: GrantFiled: October 2, 2003Date of Patent: May 16, 2006Assignee: SUSS MicroTec Testsystems GmbHInventors: Stefan Schneidewind, Claus Dietrich, Jorg Kiesewetter, Frank-Michael Werner, Axel Schmidt, Matthias Zieger
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Publication number: 20050083037Abstract: Arrangement and method for testing a substrate under load with a prober are provided, by which the full productivity of the prober can be exploited. The arrangement includes a chuck, a chuck driver, control electronics, probe or probe card holding means, and has a loading means for applying a thermal, mechanical, electrical or other physical or chemical loading to the substrate. The substrate is subjected to a loading and then its properties are measured by means of the prober. The loading means is arranged as a separate subassembly separated from the prober and therein is connected to the latter via a handling system. The method provides for the substrate to be brought into operative connection with a loading means, subjected to the loading in this loading means, then removed from the loading means and tested in terms of its functions.Type: ApplicationFiled: August 27, 2004Publication date: April 21, 2005Inventors: Stefan Schneidewind, Claus Dietrich, Frank-Michael Werner, Don Feuerstein, Mike Lancaster, Denis Place
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Publication number: 20050083036Abstract: An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.Type: ApplicationFiled: August 27, 2004Publication date: April 21, 2005Inventors: Stefan Schneidewind, Claus Dietrich, Frank-Michael Werner, Don Feuerstein, Mike Lancaster, Denis Place
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Publication number: 20040119492Abstract: The invention, which relates to a method for testing movement-sensitive substrates, in which a substrate is mounted on a chuck and makes contact with contact-making needles, and relates to an apparatus which is provided with a chuck which is connected to a positioning apparatus and has contact needles, is based on the object of allowing testing of physical characteristics relating to the mechanical dynamic response of movement-sensitive substrates. This object is achieved in that the substrate is mechanically accelerated during the determination of the physical characteristics. The chuck in this case comprises a lower chuck member and an upper chuck member, with the two chuck members are arranged to move relative to one another, and with at least one movement element being arranged between the two chuck members.Type: ApplicationFiled: October 31, 2003Publication date: June 24, 2004Inventors: Stefan Schneidewind, Claus Dietrich, Jorg Kiesewetter, Frank-Michael Werner