Patents by Inventor Frank Perlaki

Frank Perlaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arrangement for growing a thin dielectric layer on a semiconductor wafer at low temperatures
    Patent number: 5861190
    Abstract: A process of growing a dielectric layer includes a step of heating a gas mixture of at least one gas having a first chemical element of oxygen and a second chemical element other than oxygen to a first predetermined temperature to produce reactive precursors of the gas mixture. The reactive precursors are then introduced into a reaction chamber that houses at least one wafer to grow the dielectric layer on the wafer within the reaction chamber at a second predetermined temperature below the first predetermined temperature. A semiconductor manufacturing apparatus of growing the dielectric layer is also described.
    Type: Grant
    Filed: March 25, 1996
    Date of Patent: January 19, 1999
    Assignee: Hewlett-Packard Co.
    Inventors: Wayne M. Greene, Michael B. Cox, Frank Perlaki, Elizabeth C. Carr