Abstract: A device for measuring imaging properties of an optical system including: a rigid holding device; and MTF measuring devices arranged at predefined positions of the holding device such that, by each of the MTF measuring devices, a modulation transfer function can be measured at respective different, predefinable, angular positions in the image field of the optical system; wherein the holding device includes at least a first holder and a second holder; the MTF measuring devices include a first group and a second group; the first holder holds the first group at first positions so that the first group are arranged on a first spherical shell; the second holder holds the second group at second positions so that the second group are arranged on a second spherical shell; and the first spherical shell and the second spherical shell have different radii and are arranged so as to be mutually concentric.

Abstract: A device for measuring imaging properties of an optical system including: a rigid holding device; and MTF measuring devices arranged at predefined positions of the holding device such that, by each of the MTF measuring devices, a modulation transfer function can be measured at respective different, predefinable, angular positions in the image field of the optical system; wherein the holding device includes at least a first holder and a second holder; the MTF measuring devices include a first group and a second group; the first holder holds the first group at first positions so that the first group are arranged on a first spherical shell; the second holder holds the second group at second positions so that the second group are arranged on a second spherical shell; and the first spherical shell and the second spherical shell have different radii and are arranged so as to be mutually concentric.

Abstract: The invention relates to a method for structuring a substrate. According to said method, at least one mask with at least one opening is arranged over the substrate, and unmasked regions are modified in relation to masked regions of the substrate in order to form structures. The inventive method is characterised in that the representation of the mask opening on and/or in the substrate has smaller dimensions than those of the actual mask opening. The invention also relates to a device for carrying out said method.