Patents by Inventor Frank Pieter Albert VAN DEN BERKMOTEL

Frank Pieter Albert VAN DEN BERKMOTEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20180231897
    Abstract: A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.
    Type: Application
    Filed: June 21, 2016
    Publication date: August 16, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Andre Bernardus JEUNINK, Robert DE JONG, Martinus Hendrikus Antonius LEENDERS, Evelyn Wallis PACITTI, Thomas POIESZ, Frank Pieter Albert VAN DEN BERKMOTEL