Abstract: A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the substrate, a first seal member projecting from the main body surface and having an upper surface, the first seal member surrounding the plurality of main burls and configured to restrict the passage of liquid between the substrate and the main body surface radially inward past the first seal member, and a plurality of minor burls projecting from the upper surface of the first seal member, wherein each minor burl has a distal end surface configured to support the substrate.

Abstract: A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the substrate, a first seal member projecting from the main body surface and having an upper surface, the first seal member surrounding the plurality of main burls and configured to restrict the passage of liquid between the substrate and the main body surface radially inward past the first seal member, and a plurality of minor burls projecting from the upper surface of the first seal member, wherein each minor burl has a distal end surface configured to support the substrate.

Abstract: A substrate support for supporting a substrate in a lithographic apparatus, the substrate support including: a support body configured to support the substrate; a main body separate from the support body and configured to support the support body, the main body including a thermal conditioner configured to thermally condition the main body and/or support body and/or substrate; and an extractor body surrounding the main body and the support body, the extractor body having an extraction channel configured to extract fluid from near a peripheral part of the substrate.

Abstract: A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the substrate, a first seal member projecting from the main body surface and having an upper surface, the first seal member surrounding the plurality of main burls and configured to restrict the passage of liquid between the substrate and the main body surface radially inward past the first seal member, and a plurality of minor burls projecting from the upper surface of the first seal member, wherein each minor burl has a distal end surface configured to support the substrate.

Abstract: A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the substrate, a first seal member projecting from the main body surface and having an upper surface, the first seal member surrounding the plurality of main burls and configured to restrict the passage of liquid between the substrate and the main body surface radially inward past the first seal member, and a plurality of minor burls projecting from the upper surface of the first seal member, wherein each minor burl has a distal end surface configured to support the substrate.

Abstract: A quick change tool includes a tool element, an elongate body having a drive shaft and attaching means for attaching the tool element to the body, and a receiving element for attaching to the tool element. The receiving element includes a through-hole for receiving the body by sliding through the receiving element in the longitudinal direction of the body. The receiving element is configured to co-act with the attaching means to lock the tool element relative to the body at least in an axial direction of the drive shaft. The attaching means includes a resiliently movable locking pin arranged spring-mounted in the body. The receiving element comprises a locking hole configured to receive the locking pin therein in a snapping manner. A pin guiding groove extends between a receiving opening of the through-hole and the locking hole for guiding the locking pin from the receiving opening to the locking hole.

Abstract: A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the substrate, a first seal member projecting from the main body surface and having an upper surface, the first seal member surrounding the plurality of main burls and configured to restrict the passage of liquid between the substrate and the main body surface radially inward past the first seal member, and a plurality of minor burls projecting from the upper surface of the first seal member, wherein each minor burl has a distal end surface configured to support the substrate.

Abstract: A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.

Abstract: A device (20) is disclosed for dispensing a fluid supplied from an external fluid source. The device comprises a transducer (32) adapted to receive a fluid from the fluid source, and a collapsible linkage and trip link (502) coupling the transducer and the fluid source. The linkage has a collapsible joint inhibiting discharge of the fluid source when in a locked orientation. The device (20) further comprises a moveable member coupled to the linkage such that inhalation forces on the device cause the linkage to collapse thereby discharging the fluid from the fluid source. The device may further include a dose counter coupled to the fluid source for registering the amount of doses administered from the fluid source.

Abstract: A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.

Abstract: A quick change tool includes a tool element, an elongate body having a drive shaft and attaching means for attaching the tool element to the body, and a receiving element for attaching to the tool element. The receiving element includes a through-hole for receiving the body by sliding through the receiving element in the longitudinal direction of the body. The receiving element is configured to co-act with the attaching means to lock the tool element relative to the body at least in an axial direction of the drive shaft. The attaching means includes a resiliently movable locking pin arranged spring-mounted in the body. The receiving element comprises a locking hole configured to receive the locking pin therein in a snapping manner. A pin guiding groove extends between a receiving opening of the through-hole and the locking hole for guiding the locking pin from the receiving opening to the locking hole.

Abstract: A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.

Abstract: A measurement system for a lithographic apparatus includes a sub-frame compliantly mounted on a reference frame. A measurement device, e.g. an alignment sensor, is mounted on the sub-frame. Soft mounting of the sub-frame isolates the alignment sensor from high-frequency disturbances, e.g. acoustic noise, by acting as a low-pass filter with a cut-off frequency, e.g. in the range of from 100 to 200 Hz.

Abstract: A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.

Abstract: An inhaler for delivering a powdered medicament from a container. The inhaler includes a flow channel, an opening means and a housing. The flow channel includes a conduit extending from an inlet to an outlet and includes a medicament introduction region within which a powdered medicament can be introduced. The housing includes a loading member which includes a holder for receiving a medicament container. The loading member can be manually moved between a loading position, in which a container can be manually loaded into, or removed from, the holder, and an inhalation position in which the powdered medicament can be introduced into the flow channel. The movement of the loading member from the loading position to the inhalation position causes the opening means to break a seal on the container, thereby exposing the powdered medicament for introduction into the flow channel.

Abstract: A measurement system for a lithographic apparatus includes a sub-frame compliantly mounted on a reference frame. A measurement device, e.g. an alignment sensor, is mounted on the sub-frame. Soft mounting of the sub-frame isolates the alignment sensor from high-frequency disturbances, e.g. acoustic noise, by acting as a low-pass filter with a cut-off frequency, e.g. in the range of from 100 to 200 Hz.

Abstract: A combustor for providing homogeneous combustion of liquid fuels includes an essentially tube shaped combustion body, including a combustion chamber having a plurality of reaction zones, one of which is an injection zone, the others being combustion zones for staged homogeneous combustion of evaporated fuel and air. A swirler, including a base and swirler elements, is configured to operate at a swirl number between 0.6-2.5 in combination with a flow constriction plate whose size is such that the ratio of the open diameter (De) of the constriction to the diameter (D) of the combustion body is <0.7 and the constrictor plate is placed at a distance (L1) from the base of the swirler base so that L1/De>1. A primary mixing plate is placed downstream from the constriction plate at a distance (L2) so that the ratio L2/L1<1 to allow maximum mixing of the homogeneous combustion.

Abstract: A device (20) is disclosed for dispensing a fluid supplied from an external fluid source. The device comprises a transducer (32) adapted to receive a fluid from the fluid source, and a collapsible linkage and trip link (502) coupling the transducer and the fluid source. The linkage has a collapsible joint inhibiting discharge of the fluid source when in a locked orientation. The device (20) further comprises a moveable member coupled to the linkage such that inhalation forces on the device cause the linkage to collapse thereby discharging the fluid from the fluid source. The device may further include a dose counter coupled to the fluid source for registering the amount of doses administered from the fluid source.

Abstract: A combustor for providing homogeneous combustion of liquid fuels includes an essentially tube shaped combustion body, including a combustion chamber having a plurality of reaction zones, one of which is an injection zone, the others being combustion zones for staged homogeneous combustion of evaporated fuel and air. A swirler, including a base and swirler elements, is configured to operate at a swirl number between 0.6-2.5 in combination with a flow constriction plate whose size is such that the ratio of the open diameter (De) of the constriction to the diameter (D) of the combustion body is <0.7 and the constrictor plate is placed at a distance (L1) from the base of the swirler base so that L1/De>1. A primary mixing plate is placed downstream from the constriction plate at a distance (L2) so that the ratio L2/L1<1 to allow maximum mixing of the homogeneous combustion.