Patents by Inventor Frank R. Hedges

Frank R. Hedges has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS)
    Patent number: 6458984
    Abstract: A method of purifying tetraethylorthosilicate (TEOS) to remove boron impurities therefrom, and a related method of analyzing TEOS to determine concentration of boron impurities therein.
    Type: Grant
    Filed: March 31, 2000
    Date of Patent: October 1, 2002
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Thomas H. Baum, Chongying Xu, Frank R. Hedges, David Daniel Bernhard, Brian L. Benac, Scott L. Battle, John M. Lansdown