Patents by Inventor Frank Schleicher

Frank Schleicher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Projection exposure apparatus and method for measuring a projection lens
    Patent number: 10585356
    Abstract: Microlithographic projection exposure apparatus (100) has a projection lens (150) configured to image an object plane (155) onto an image plane (156), wherein an immersion liquid is at least temporarily provided during operation of the projection exposure apparatus between the projection lens and the image plane, wherein a measurement structure (121) is arranged in the immersion liquid, and wherein the measurement structure is configured to generate a measurement pattern. The projection exposure apparatus also has a measurement device (130, 160) configured to measure the measurement pattern. The measurement structure has an absorption layer (125) including silicon oxide and/or silicon oxynitride and/or nitride.
    Type: Grant
    Filed: August 31, 2018
    Date of Patent: March 10, 2020
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Eugen Foca, Frank Schadt, Uwe Hempelmann, Frank Schleicher
  • PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING A PROJECTION LENS
    Publication number: 20180373163
    Abstract: Microlithographic projection exposure apparatus (100) has a projection lens (150) configured to image an object plane (155) onto an image plane (156), wherein an immersion liquid is at least temporarily provided during operation of the projection exposure apparatus between the projection lens and the image plane, wherein a measurement structure (121) is arranged in the immersion liquid, and wherein the measurement structure is configured to generate a measurement pattern. The projection exposure apparatus also has a measurement device (130, 160) configured to measure the measurement pattern. The measurement structure has an absorption layer (125) including silicon oxide and/or silicon oxynitride and/or nitride.
    Type: Application
    Filed: August 31, 2018
    Publication date: December 27, 2018
    Inventors: Eugen FOCA, Frank SCHADT, Uwe HEMPELMANN, Frank SCHLEICHER
  • Method for controlling a gear unit of a motor vehicle having synchronizing devices
    Patent number: 6474185
    Abstract: A method for controlling a gear unit of a motor vehicle having synchronizing devices. When an actuating device of a synchronizing device is controlled in terms of force or travel, strongly differing wear behavior occurs depending on use. The inclination of the travel path or the shifting frequency is detected during operation of the motor vehicle and a characteristic diagram is used in order to adapt the shifting force to the information item obtained.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: November 5, 2002
    Assignee: DaimlerChrysler AG
    Inventors: Werner Hillenbrand, Frank Schleicher
  • Method for controlling a gear unit of a motor vehicle having synchronizing devices
    Publication number: 20010032523
    Abstract: A method for controlling a gear unit of a motor vehicle having synchronizing devices. When an actuating device of a synchronizing device is controlled in terms of force or travel, strongly differing wear behavior occurs depending on use. The inclination of the travel path or the shifting frequency is detected during operation of the motor vehicle and a characteristic diagram is used in order to adapt the shifting force to the information item obtained.
    Type: Application
    Filed: January 16, 2001
    Publication date: October 25, 2001
    Inventors: Werner Hillenbrand, Frank Schleicher