Patents by Inventor Frank Siebke

Frank Siebke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11915922
    Abstract: A silicon wafer for an electronic component, having an epitaxially grown silicon layer on a carrier substrate and the silicon layer is removed as a silicon wafer from the carrier substrate, in which at least one p-dopant and at least one n-dopant are introduced into the silicon layer during the epitaxial growth. The dopants are introduced into the silicon layer such that the silicon layer is formed having an electrically active p-doping and an electrically active n-doping, each greater than 1×1014 cm?3.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: February 27, 2024
    Assignee: NexWafe GmbH
    Inventors: Stefan Reber, Kai Schillinger, Frank Siebke
  • Publication number: 20210217607
    Abstract: A silicon wafer for an electronic component, having an epitaxially grown silicon layer on a carrier substrate and the silicon layer is removed as a silicon wafer from the carrier substrate, in which at least one p-dopant and at least one n-dopant are introduced into the silicon layer during the epitaxial growth. The dopants are introduced into the silicon layer such that the silicon layer is formed having an electrically active p-doping and an electrically active n-doping, each greater than 1×1014 cm?3.
    Type: Application
    Filed: March 18, 2021
    Publication date: July 15, 2021
    Applicant: NexWafe GmbH
    Inventors: Stefan REBER, Kai SCHILLINGER, Frank SIEBKE
  • Patent number: 10985005
    Abstract: A method for producing a silicon wafer for an electronic component, having the method step of epitaxially growing of a silicon layer on a carrier substrate and removing the silicon layer as a silicon wafer from the carrier substrate, in which at least one p-dopant and at least one n-dopant are introduced into the silicon layer during the epitaxial growth. The dopants are introduced into the silicon layer such that the silicon layer is formed having an electrically active p-doping and an electrically active n-doping, each greater than 1×1014 cm?3.
    Type: Grant
    Filed: April 11, 2017
    Date of Patent: April 20, 2021
    Assignee: NexWafe GmbH
    Inventors: Stefan Reber, Kai Schillinger, Frank Siebke
  • Patent number: 10508365
    Abstract: A method for producing a semiconductor layer (3), including the following method steps: A creating a release layer (2) on a carrier substrate (1); B applying a semiconductor layer (3) to the release layer (2); C detaching the semiconductor layer (3) from the carrier substrate. The invention is characterized in that, in method step A, the release layer (2) is created so as to fully cover at least a processing side of the carrier substrate, in that, in method step B, the semiconductor layer (3) is applied so as to fully cover the release layer (2) at least on the processing side and partially overlap one or more peripheral sides (5a, 5b) of the carrier substrate and in that, between method steps B and C, in a method step C0, regions of the semiconductor layer (3) that overlap a peripheral side are removed. The invention also relates to a semiconductor wafer, to a device for edge correction, to a detaching unit and to a device for producing a semiconductor layer.
    Type: Grant
    Filed: September 27, 2016
    Date of Patent: December 17, 2019
    Assignee: NexWafe GmbH
    Inventors: Stefan Reber, Kai Schillinger, Frank Siebke
  • Publication number: 20190131121
    Abstract: A method for producing a silicon wafer for an electronic component, having the method step of epitaxially growing of a silicon layer on a carrier substrate and removing the silicon layer as a silicon wafer from the carrier substrate, in which at least one p-dopant and at least one n-dopant are introduced into the silicon layer during the epitaxial growth. The dopants are introduced into the silicon layer such that the silicon layer is formed having an electrically active p-doping and an electrically active n-doping, each greater than 1×1014 cm?3.
    Type: Application
    Filed: April 11, 2017
    Publication date: May 2, 2019
    Applicant: NexWafe GmbH
    Inventors: Stefan Reber, Kai Schillinger, Frank Siebke
  • Publication number: 20180305839
    Abstract: A method for producing a semiconductor layer (3), including the following method steps: A creating a release layer (2) on a carrier substrate (1); B applying a semiconductor layer (3) to the release layer (2); C detaching the semiconductor layer (3) from the carrier substrate. The invention is characterized in that, in method step A, the release layer (2) is created so as to fully cover at least a processing side of the carrier substrate, in that, in method step B, the semiconductor layer (3) is applied so as to fully cover the release layer (2) at least on the processing side and partially overlap one or more peripheral sides (5a, 5b) of the carrier substrate and in that, between method steps B and C, in a method step C0, regions of the semiconductor layer (3) that overlap a peripheral side are removed. The invention also relates to a semiconductor wafer, to a device for edge correction, to a detaching unit and to a device for producing a semiconductor layer.
    Type: Application
    Filed: September 27, 2016
    Publication date: October 25, 2018
    Applicant: NexWafe GmbH
    Inventors: Stefan Reber, Kai Schillinger, Frank Siebke