Patents by Inventor Frank Stefan Schneider

Frank Stefan Schneider has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures
    Patent number: 11041816
    Abstract: Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: June 22, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Maxim Pisarenco, Frank Stefan Schneider, Markus Gerardus Martinus Maria Van Kraaij, Martijn Constant Van Beurden
  • Methods and Apparatus for Calculating Electromagnetic Scattering Properties of a Structure and for Reconstruction of Approximate Structures
    Publication number: 20180164229
    Abstract: Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.
    Type: Application
    Filed: December 12, 2017
    Publication date: June 14, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Maxim Pisarenco, Frank Stefan Schneider, Markus Gerardus Martinus Maria Van Kraaij, Martijn Constant Van Beurden