Patents by Inventor Frank Thrum

Frank Thrum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for multiple irradiation of a resist
    Patent number: 8227177
    Abstract: The invention relates to a method with contrast reversal which, inter alia, opens up new areas of application for resists.
    Type: Grant
    Filed: May 10, 2007
    Date of Patent: July 24, 2012
    Assignee: Infineon Technologies AG
    Inventors: Kang-Hoon Choi, Klaus Elian, Christoph Hohle, Johannes Kretz, Frank Thrum
  • Method for Multiple Irradiation of a Resist
    Publication number: 20070264595
    Abstract: The invention relates to a method with contrast reversal which, inter alia, opens up new areas of application for resists.
    Type: Application
    Filed: May 10, 2007
    Publication date: November 15, 2007
    Inventors: Kang-Hoon Choi, Klaus Elian, Christoph Hohle, Johannes Kretz, Frank Thrum