Patents by Inventor Frank Treubel

Frank Treubel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, measuring system and lithography apparatus
    Patent number: 11163239
    Abstract: A method for localizing an abnormality in a travel path of an optical component in or for a lithography apparatus includes: a) moving the optical component in at least one first degree of freedom; b) detecting a movement (Rz) of the optical component and/or a force acting on the optical component in at least one second degree of freedom; and c) localizing the abnormality as a function of the movement detected in b) and/or the force detected in b).
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: November 2, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Frank Treubel, Christoph Fetzer
  • METHOD, MEASURING SYSTEM AND LITHOGRAPHY APPARATUS
    Publication number: 20210026252
    Abstract: A method for localizing an abnormality in a travel path of an optical component in or for a lithography apparatus includes: a) moving the optical component in at least one first degree of freedom; b) detecting a movement (Rz) of the optical component and/or a force acting on the optical component in at least one second degree of freedom; and c) localizing the abnormality as a function of the movement detected in b) and/or the force detected in b).
    Type: Application
    Filed: October 8, 2020
    Publication date: January 28, 2021
    Inventors: Frank Treubel, Christoph Fetzer
  • Magnetic component
    Patent number: 7070869
    Abstract: The invention relates to an element, comprising a substrate with a surface roughness of less than 5 nm, with saturated bonds on the surface and an MPt3 film applied to at least one side of the substrate, with a magnetic anisotropy perpendicular to the plane of the film, with M=a metal of the 5th to 9th sub-group of the periodic table, nickel or gadolinium. The invention further relates to a method for production of the above and the use of said elements as a magnetic component, for example as a magnetic sensor or as a magneto-optical storage element.
    Type: Grant
    Filed: August 9, 2001
    Date of Patent: July 4, 2006
    Assignee: Universität Konstanz
    Inventors: Günter Schatz, Manfred Albrecht, Mireille Maret, Andreas Maier, Frank Treubel
  • Magnetic component
    Publication number: 20040099919
    Abstract: The invention relates to an element, comprising a substrate with a surface roughness of less than 5 nm, with saturated bonds on the surface and an MPt3 film applied to at least one side of the substrate, with a magnetic anisotropy perpendicular to the plane of the film, with M=a metal of the 5th to 9th sub-group of the periodic table, nickel or gadolinium. The invention further relates to a method for production of the above and the use of said elements as a magnetic component, for example as a magnetic sensor or as a magneto-optical storage element.
    Type: Application
    Filed: August 6, 2003
    Publication date: May 27, 2004
    Inventors: Gunter Schatz, Manfred Albrecht, Mireille Maret, Andreas Maier, Frank Treubel