Patents by Inventor Frank Vincent Belanger

Frank Vincent Belanger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for detecting contaminants
    Patent number: 7430893
    Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.
    Type: Grant
    Filed: December 1, 2004
    Date of Patent: October 7, 2008
    Assignee: Entegris, Inc.
    Inventors: Anatoly Grayfer, Jürgen Michael Lobert, William Goodwin, Frank Vincent Belanger, John E. Sergi, Mark C. Phelps