Patents by Inventor Frank Voss
Frank Voss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20030168178Abstract: The invention relates to a device that is provided with a pressing and applying drum (17) which is driven during start-stop operation and is used for applying the labels (16) to flat objects (20) that are transported along a conveying path. A label strip (1) having a bend that matches the receiving drum surface is pushed onto the side of the pressing and applying drum (17) with the adhesive side thereof facing towards the outside and vertically in relation to the transport plane of the flat objects (20) by means of a label conveying and cutting device (4), whereby said side faces away from the objects (20). The portion which is situated on the stationary pressing and applying drum (17) is cut off by means of a cutter device that is adapted to the bend.Type: ApplicationFiled: April 29, 2003Publication date: September 11, 2003Inventors: Jurgen Francke, Frank Voss
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Publication number: 20030159784Abstract: The invention relates to a device that is provided with a pressing and applying drum (17) which is driven during start-stop operation in a controlled manner and is used for applying the labels (16) to flat objects (20) which are transported along a conveying path. The aim of the invention is to transport said objects (20) past the pressing and applying drum. Said drum is provided with a first casing region (23) which receives labels and has a circular bend. The centre of the circle is situated within the rotational axis. The drum is also provided with a second casing region (24). The surface of said second casing region is displaced towards the inside to such an extend that the second casing region (24) cannot touch the objects in a disturbing manner. The two casing regions (23, 24) are connected to one another by means of transition areas (25).Type: ApplicationFiled: April 24, 2003Publication date: August 28, 2003Inventors: Jurgen Francke, Frank Voss
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Publication number: 20030108416Abstract: The present invention comprises a system and method for loading or stacking objects into open top containers. The objects may be flat with wide and narrow sides and may further comprise mail pieces. The system comprises a pivoting unit for pivoting a container holding member into one of at least two positions: a top position, and a stacking position. In the top position, the container is held such that the open top faces substantially upwards, while in the bottom position the top faces substantially horizontal. A stacking aid is introduced into the container when it is held in the top position. The stacking aid includes an inclined wall that helps guide the objects into the container. A height sensor may also be included. The pivoting unit may also include a horizontal extension unit which may telescope the container in a horizontal direction. This facilitates easier manual handling of the container.Type: ApplicationFiled: January 17, 2003Publication date: June 12, 2003Inventors: Holger Schererz, Frank Voss, Bertram Wanner
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Publication number: 20030095580Abstract: A system is provided for delivering a lithographic exposure radiation source beam of wavelength less than 200 nm from a lithographic exposure radiation source through a sealed enclosure preferably sealably connected to the lithographic exposure radiation source, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the lithographic exposure radiation source. Also, alternatively, the enclosure may be evacuated and no inert gas flowed. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably made of steel and/or copper.Type: ApplicationFiled: October 7, 2002Publication date: May 22, 2003Inventors: Sergei V. Govorkov, Klaus Wolfgang Vogler, Frank Voss, Gongxue Hua, Rainer Paetzel
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Patent number: 6556613Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: GrantFiled: August 7, 2001Date of Patent: April 29, 2003Assignee: Lambda Physik AGInventors: Jürgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Görtler
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Patent number: 6533266Abstract: The invention pertains to a transport device for rerouting flat mail pieces (6) that are transported clamped between an endless lower band (1) and an endless upper band (2), wherein the upper band (2) is realized in a longitudinally elastic fashion and guided back in an outwardly directed loop. According to the invention, an inexpensive and space-saving rerouting with the least possible stress on the mail pieces is realized due to the fact that the driven lower band (1) is guided on a stationary, immovable guide element (3) with a sliding surface that has the shape of a curved segment, and the sliding surface of the curved segment has a lower coefficient of friction than the lower band (1) and the mail pieces (6). The lower band (1) has a low coefficient of friction on its side facing the guide element (3) and has a high coefficient of friction on its side facing the non-driven upper band (2) and the mail pieces (6).Type: GrantFiled: November 17, 2000Date of Patent: March 18, 2003Assignee: Siemens AktiengesellschaftInventors: Holger Schererz, Frank Voss, Matthias Prasser
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Patent number: 6529533Abstract: A beam parameter monitoring unit is provided for use with a F2 laser system including means for filtering the red light from the VUV light of a beam portion split off from the mainbeam of the F2 laser before the beam portion reaches a detector. The filtering means includes a mirror that is highly reflective of VUV light (“VUV HR mirror”), particularly around 157 nm, and transparent to red light. The VUV HR mirror reflects the VUV light to a detector such that the properties and parameters of the main beam can be monitored, adjusted, controlled and/or stabilized. The VUV HR mirror is preferably surrounded by a shield for absorbing the red light transmitted through or around the VUV HR mirror. Also preferably, an aperture is provided that is just wide enough to permit the VUV radiation to substantially pass through, and to block the outer portions of the incident beam portion including substantially only red light.Type: GrantFiled: November 14, 2000Date of Patent: March 4, 2003Assignee: Lambda Physik AGInventor: Frank Voss
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Patent number: 6526084Abstract: An efficient and practical means and method is provided for monitoring the F2 concentration in an F2 excimer laser. The F2 concentration is monitored by measuring the concentration F atoms and more specifically by measuring the amount of red laser light emitted during discharge. The amount of red laser light emitted during discharge is a function of the concentration of F atoms because such red laser light is emitted by excited F atoms. There is also a relationship between the concentration of F atoms and the concentration of molecular F2 in the discharge chamber. Accordingly, the concentration of F2 gas may be monitored by measuring the amount of red laser light emitted during discharge.Type: GrantFiled: February 8, 2000Date of Patent: February 25, 2003Assignee: Lambda Physik AGInventor: Frank Voss
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Patent number: 6490305Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.Type: GrantFiled: September 26, 2001Date of Patent: December 3, 2002Assignee: Lambda Physik AGInventors: Sergei V. Govorkov, Klaus Wolfgang Vogler, Frank Voss, Rainer Pätzel
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Patent number: 6487229Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.Type: GrantFiled: September 26, 2001Date of Patent: November 26, 2002Assignee: Lambda Physik AGInventors: Sergei V. Govorkov, Klaus Wolfgang Vogler, Frank Voss, Rainer Pätzel
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Patent number: 6477187Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: GrantFiled: August 7, 2001Date of Patent: November 5, 2002Assignee: Lambda Physik AGInventors: Jürgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Görtler
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Patent number: 6466598Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: GrantFiled: August 7, 2001Date of Patent: October 15, 2002Assignee: Lambda Physik AGInventors: Jürgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Görtler
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Patent number: 6459720Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: GrantFiled: August 7, 2001Date of Patent: October 1, 2002Assignee: Lambda Physik AGInventors: Jürgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Görtler
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Publication number: 20020041614Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.Type: ApplicationFiled: September 26, 2001Publication date: April 11, 2002Applicant: Lambda Physik AGInventors: Sergei V. Govorkov, Klaus Wolfgang Vogler, Frank Voss, Rainer Patzel
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Publication number: 20020041616Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: ApplicationFiled: August 7, 2001Publication date: April 11, 2002Applicant: Lambda Physik AG.Inventors: Jurgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Gortler
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Publication number: 20020034207Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.Type: ApplicationFiled: September 26, 2001Publication date: March 21, 2002Applicant: Lambda Physik AGInventors: Sergei V. Govorkov, Klaus Wolfgang Vogler, Frank Voss, Rainer Patzel
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Publication number: 20020034206Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: ApplicationFiled: August 7, 2001Publication date: March 21, 2002Applicant: Lambda Physik AG.Inventors: Jurgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Gortler
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Publication number: 20020015432Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: ApplicationFiled: August 7, 2001Publication date: February 7, 2002Applicant: Lambda Physik AGInventors: Jurgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Gortler
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Publication number: 20020015431Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: ApplicationFiled: August 7, 2001Publication date: February 7, 2002Applicant: Lambda Physik AGInventors: Jurgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Gortler
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Patent number: 6345065Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost.Type: GrantFiled: May 24, 1999Date of Patent: February 5, 2002Assignee: Lambda Physik AGInventors: Jürgen Kleinschmidt, Peter Heist, Frank Voss, Andreas Görtler