Patents by Inventor Frank W. Fischer

Frank W. Fischer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a semiconductor component and polyimide etchant therefor
    Patent number: 6664200
    Abstract: A method of manufacturing a semiconductor component having a layer (240, 340) comprised of polyimide includes using an etchant that is at least partially composed of aminopropanediol to etch the layer comprised of polyimide. The etchant can also include a solvent, a diluent, and water.
    Type: Grant
    Filed: April 28, 2000
    Date of Patent: December 16, 2003
    Inventors: Edward R. Prack, Frank W. Fischer, Treliant Fang
  • Method for coating a substrate with a coating solution
    Patent number: 5773083
    Abstract: A method for coating a substrate with a coating solution. In a first step (31), a semiconductor wafer is placed on a turntable. In a second step (32), the substrate is spun at a high speed and a coating solution is dispensed onto the substrate. In a third step (33), the turntable is spun at a low speed and additional coating solution is dispensed onto the substrate.
    Type: Grant
    Filed: October 15, 1997
    Date of Patent: June 30, 1998
    Assignee: Motorola, Inc.
    Inventors: Frank W. Fischer, Thomas W. Peterson