Patents by Inventor Frans Wiegers

Frans Wiegers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vertical furnace for processing substrates and a liner for use therein
    Patent number: 10883175
    Abstract: The disclosure relates to a vertical furnace for processing a plurality of substrates and a liner for use therein. The vertical furnace having an outer reaction tube having a central axis; and a liner constructed to extend in the interior of the outer reaction tube. The liner defines an interior space for accommodating substrates and is provided with a gas exhaust hole extending from the interior space to the outside. One of the outer wall of the liner and the inner wall of the reaction tube is provided with a flow deflector that protrudes radially from the respective wall into a gas passage between an outer wall of the liner and an inner wall of the reaction tube.
    Type: Grant
    Filed: August 9, 2018
    Date of Patent: January 5, 2021
    Assignee: ASM IP Holding B.V.
    Inventor: Frans Wiegers
  • VERTICAL FURNACE FOR PROCESSING SUBSTRATES AND A LINER FOR USE THEREIN
    Publication number: 20200048768
    Abstract: The disclosure relates to a vertical furnace for processing a plurality of substrates and a liner for use therein. The vertical furnace having an outer reaction tube having a central axis; and a liner constructed to extend in the interior of the outer reaction tube. The liner defines an interior space for accommodating substrates and is provided with a gas exhaust hole extending from the interior space to the outside. One of the outer wall of the liner and the inner wall of the reaction tube is provided with a flow deflector that protrudes radially from the respective wall into a gas passage between an outer wall of the liner and an inner wall of the reaction tube.
    Type: Application
    Filed: August 9, 2018
    Publication date: February 13, 2020
    Inventor: Frans Wiegers