Patents by Inventor Fransisca Maria Astrid Sudargho

Fransisca Maria Astrid Sudargho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEVICE FOR DETERMINING THE COEFFICIENT OF FRICTION OF DIAMOND CONDITIONER DISCS AND A METHOD OF USE THEREOF
    Publication number: 20100107726
    Abstract: A device for determining the coefficient of friction of diamond conditioner discs and a method of use thereof.
    Type: Application
    Filed: October 31, 2008
    Publication date: May 6, 2010
    Applicants: Mitsubishi Materials Corporation, Araca Inc.
    Inventors: Leonard Borucki, Naoki Rikita, Ara Philipossian, Fransisca Maria Astrid Sudargho, Yun Zhuang
  • METHOD AND APPARATUS FOR DETERMINING SHEAR FORCE BETWEEN THE WAFER HEAD AND POLISHING PAD IN CHEMICAL MECHANICAL POLISHING
    Publication number: 20100099333
    Abstract: A method for (a) determining the shear force between a wafer head and a polishing pad in a polishing tool using a CMP polishing tool with a plate above the wafer head which hangs or rests on the plate. The plate is connected to the CMP polishing tool by (b) low friction motion means (c). A load cell sensor is fixed to the framework of the polishing tool or another immovable structure. (d) The load cell determines the force from the leading edge of the plate when the wafer head is in contact with the polishing pad. (e) Signals from the load cell sensor reporting the shear force. A CMP polishing tool which includes elements corresponding to each of points (a)-(e) in the above method.
    Type: Application
    Filed: October 20, 2008
    Publication date: April 22, 2010
    Inventors: Fransisca Maria Astrid Sudargho, Ara Philipossian, Leonard Borucki, Masanori Furukawa, Koichiro Ichikawa