Patents by Inventor Fransiscus Martines Roes

Fransiscus Martines Roes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 6836315
    Abstract: A method of providing pitch torque compensation for planar motors in which pitch torque is not inherently provided includes calculating and summing a given set of forces ideally required to be applied by each forcer in the planar motor. Correction forces for each forcer are determined such that the net effect of the corrections is equal and opposite to the pitch torques previously determined.
    Type: Grant
    Filed: April 22, 2003
    Date of Patent: December 28, 2004
    Assignee: ASML Netherlands B.V.
    Inventor: Fransiscus Martines Roes
  • Lithographic apparatus and device manufacturing method
    Publication number: 20040016891
    Abstract: A method of providing pitch torque compensation for planar motors in which pitch torque is not inherently provided includes calculating and summing a given set of forces ideally required to be applied by each forcer in the planar motor. Correction forces for each forcer are determined such that the net effect of the corrections is equal and opposite to the pitch torques previously determined.
    Type: Application
    Filed: April 22, 2003
    Publication date: January 29, 2004
    Applicant: ASML NETHERLANDS, B.V.
    Inventor: Fransiscus Martines Roes