Patents by Inventor Fransiscus X.G. RIVAI

Fransiscus X.G. RIVAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for detection of passive voltage contrast
    Patent number: 11035899
    Abstract: The present disclosure relates to a detection system, and, more particularly, to system for detection of passive voltage contrast and methods of use. The system includes a chamber; a stage provided within the chamber, configured to stage a target structure; an electron beam apparatus which is structured to emit an e-beam toward the stage; and a laser source which emits a laser signal toward the stage, at a same area as the e-beam.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: June 15, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Changqing Chen, Fransiscus X. G. Rivai, Choon Seng Adrian Ng, Kay Guan Chia
  • SYSTEM FOR DETECTION OF PASSIVE VOLTAGE CONTRAST
    Publication number: 20200363469
    Abstract: The present disclosure relates to a detection system, and, more particularly, to system for detection of passive voltage contrast and methods of use. The system includes a chamber; a stage provided within the chamber, configured to stage a target structure; an electron beam apparatus which is structured to emit an e-beam toward the stage; and a laser source which emits a laser signal toward the stage, at a same area as the e-beam.
    Type: Application
    Filed: May 15, 2019
    Publication date: November 19, 2020
    Inventors: Changqing CHEN, Fransiscus X.G. RIVAI, Choon Seng Adrian NG, Kay Guan CHIA