Patents by Inventor Franz Cemic
Franz Cemic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7271889Abstract: A device and method for inspecting an object (2) uses a bright field illumination beam path (4) of a bright field light source (5), said beam path being formed so that it passes through the projection optics (3), and a dark field illumination beam path (6) of a dark field light source (7), this beam path being formed so that it also passes through the projection optics (3). The object (2) can be projected by the projection optics (3) onto the least one detector (8), and the object (2) is simultaneously illuminated by both light sources (5, 7). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.Type: GrantFiled: August 21, 2003Date of Patent: September 18, 2007Assignee: Leica Microsystems CMS GmbHInventors: Franz Cemic, Lambert Danner, Uwe Graf, Robert Mainberger, Dirk Sönksen, Volker Knorz
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Patent number: 7209243Abstract: A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle.Type: GrantFiled: February 12, 2004Date of Patent: April 24, 2007Assignee: Leica Microsystems Semiconductor GmbHInventors: Franz Cemic, Lambert Danner, Gerhard Hoppen
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Patent number: 6975409Abstract: An illumination device according to the present invention comprises a light source (1), an optical fiber bundle (4), a coupling-in optical system (3) before and a coupling-out optical system (5) after the fiber bundle (4), and an illuminating optical system (17; 20). A homogenizing optical system (6) between the coupling-out optical system (5) and illuminating optical system (17; 20) brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system (6) advantageously comprises a micro-honeycomb condenser (7) and a lens member (8) which superimpose the exit opening of the fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image.Type: GrantFiled: June 29, 2001Date of Patent: December 13, 2005Assignee: Leica Microsystems Semiconductor GmbHInventors: Franz Cemic, Lambert Danner, Gerhard Hoppen
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Publication number: 20050259245Abstract: The invention relates to a device and method for inspecting an object (2) involving the use of a bright field illumination beam path (4) of a bright field light source (5), said beam path being formed so that it passes through the projection optics (3), and involving the use or a dark field illumination beam path (6) of a dark field light source (7), this beam path being formed so that it also passes through the projection optics (3). The object (2) can be projected by the projection optics (3) onto the least one detector (8), and the object (2) is simultaneously illuminated by both light sources (5, 7).Type: ApplicationFiled: August 21, 2003Publication date: November 24, 2005Inventors: Franz Cemic, Lambert Danner, Uwe Graf, Robert Mainberger, Dirk Sonksen, Volker Knorz
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Patent number: 6943901Abstract: A critical dimension measuring instrument includes a light source, a beam-shaping optical system, a condenser having a condenser pupil, a first microlens array arrangement, a first auxiliary optical element having positive refractive power, a second auxiliary optical element having positive refractive power, and a second microlens array arrangement. The first microlens array arrangement, the first auxiliary optical element, the second auxiliary optical element and the second microlens array arrangement are arranged in successive fashion between the beam-shaping optical system and the condenser.Type: GrantFiled: September 26, 2003Date of Patent: September 13, 2005Assignee: Leica Microsystems Semiconductor GmbHInventors: Franz Cemic, Lambert Danner
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Patent number: 6879440Abstract: An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.Type: GrantFiled: January 31, 2003Date of Patent: April 12, 2005Assignee: Leica Microsystems Semiconductor GmbHInventors: Franz Cemic, Lambert Danner, Robert Mainberger, Michael Veith, Martin Osterfeld, Uwe Graf
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Publication number: 20040160777Abstract: An illumination device according to the present invention comprises a light source (1), an optical fiber bundle (4), a coupling-in optical system (3) before and a coupling-out optical system (5) after the fiber bundle (4), and an illuminating optical system (17; 20). A homogenizing optical system (6) between the coupling-out optical system (5) and illuminating optical system (17; 20) brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system (6) advantageously comprises a micro-honeycomb condenser (7) and a lens member (8) which superimpose the exit opening of the fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image.Type: ApplicationFiled: February 12, 2004Publication date: August 19, 2004Applicant: Leica-Microsystems Wetzlar GmbHInventors: Franz Cemic, Lambert Danner, Gerhard Hoppen
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Publication number: 20040120579Abstract: A method for detecting images of an object includes: illuminating the object with a light source and imaging the object onto a detector using an imaging system so as to provide a detected image. A reference image is generated taking into account at least one property of the imaging system. The detected image is compared to the reference image. Upon a definable deviation between the detected image and the reference image, the reference image is varied so as to provide a varied reference image that at least largely corresponds to the detected image so as to enable conclusions to be drawn regarding the object.Type: ApplicationFiled: December 5, 2003Publication date: June 24, 2004Applicant: Leica Microsystems Semiconductor GmbHInventors: Franz Cemic, Carola Blaesing-Bangert
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Publication number: 20040070821Abstract: A critical dimension measuring instrument includes a light source, a beam-shaping optical system, a condenser having a condenser pupil, a first microlens array arrangement, a first auxiliary optical element having positive refractive power, a second auxiliary optical element having positive refractive power, and a second microlens array arrangement. The first microlens array arrangement, the first auxiliary optical element, the second auxiliary optical element and the second microlens array arrangement are arranged in successive fashion between the beam-shaping optical system and the condenser.Type: ApplicationFiled: September 26, 2003Publication date: April 15, 2004Applicant: Leica Microsystems Semiconductor GmbHInventors: Franz Cemic, Lambert Danner
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Publication number: 20030147134Abstract: An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.Type: ApplicationFiled: January 31, 2003Publication date: August 7, 2003Applicant: Leica Microsystems Semiconductor GmbHInventors: Franz Cemic, Lambert Danner, Robert Mainberger, Michael Veith, Martin Osterfeld, Uwe Graf
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Publication number: 20020001090Abstract: An illumination device according to the present invention comprises a light source (1), an optical fiber bundle (4), a coupling-in optical system (3) before and a coupling-out optical system (5) after the fiber bundle (4), and an illuminating optical system (17; 20). A homogenizing optical system (6) between the coupling-out optical system (5) and illuminating optical system (17; 20) brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system (6) advantageously comprises a micro-honeycomb condenser (7) and a lens member (8) which superimpose the exit opening of the fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image.Type: ApplicationFiled: June 29, 2001Publication date: January 3, 2002Applicant: Leica Microsystems Wetzlar GmbH.Inventors: Franz Cemic, Lambert Danner, Gerhard Hoppen