Patents by Inventor Franz Felberer

Franz Felberer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micro-electromechanical system microphone
    Patent number: 9344805
    Abstract: A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: May 17, 2016
    Assignee: NXP B.V.
    Inventors: Franz Felberer, Remco Henricus Wilhelmus Pijnenburg, Twan van Lippen, Iris Bominaar-Silkens
  • Micro-Electromechanical System Microphone
    Publication number: 20110123043
    Abstract: A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.
    Type: Application
    Filed: November 24, 2009
    Publication date: May 26, 2011
    Inventors: Franz Felberer, Remco Henricus Wilhelmus Pijnenburg, Twan Van Lippen, Iris Bominaar-Silkens