Abstract: Method and apparatus for illuminating a transparent material for identifying individual features in the material having similar refractive indices, without using a phase-contrast microscope, by illuminating the material by light directed at an angle to a reflective surface which directs the light through the material to a viewing device such as a microscope.

Abstract: A Mid-Objective scanner system for correcting astigmatism, bow distortion and field curvature including a tilted lens or a toric lens for producing an opposite amount of astigmatism to correct astigmatism, a scanning mechanism and a concave cylindrical mirror for directing the scanned beam onto to a workpiece wherein the concave cylindrical mirror has a radius of curvature that corrects the field of curvature in the image plane of the workpiece and thereby enables the scanner system to correct astigmatism, bow distortion and field curvature.

Abstract: A method for correcting astigmatism, bow distortion and field curvature using a Mid-Objective scanner system wherein the system includes a tilted lens or a toric lens for producing an opposite amount of astigmatism to correct astigmatism, a scanning mechanism and a concave cylindrical mirror for directing the scanned beam onto to a workpiece wherein the concave cylindrical mirror has a radius of curvature that corrects the field of curvature in the image plane of the workpiece and thereby enables the scanner system to correct astigmatism, bow distortion and field curvature.

Abstract: An apparatus and method are disclosed for laser raster scanning a substrate in an XY plane wherein a single motor is used to provide synchronized X-Y scanning by two mirrors positioned orthogonally and which move linearly in an XY plane relative to each other by the rotation of the motor shaft. A preferred embodiment uses a specially designed cam to provide back and forth laser scanning motion and an intermittent gear to provide indexing of the laser. The apparatus and method may be configured for various scan speeds, spot sizes, Y-axis indexing and X-axis scan at the object plane. Over scanning of the active XY area of the object plane is preferred to provide constant velocity and energy density over the active XY area.