Patents by Inventor Fred Cumplan

Fred Cumplan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a cavity capable of accessing deep fuse structures and device containing the same
    Patent number: 6054340
    Abstract: A method for forming a cavity (30) to a structure such as a poly fuse (114) with a deep etch process whereby a mask is formed over the structure a first dielectric layer (23) and an etch partially through the first dielectric layer is performed. Next, a second dielectric layer (34) is deposited and a second mask is formed for completing the etch to the structure. Finally, an etch through the second dielectric (34) to an area at or near the structure is performed. A resultant device has non-etched second dielectric material on the sidewalls of the etch cavity 30.
    Type: Grant
    Filed: June 6, 1997
    Date of Patent: April 25, 2000
    Assignee: Motorola, Inc.
    Inventors: Joel Mitchell, Fred Cumplan, Gary Pfeffer