Patents by Inventor Fred Freerks

Fred Freerks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slit valve door
    Patent number: 5579718
    Abstract: An improved slit valve door for sealing an aperture in the wall of a semiconductor process chamber. The slit valve door consists of an aperture cover plate with a recess in it for receiving a removable insert. An O-ring seal is placed over the insert, and when the insert is placed in the recess of the aperture cover plate, the O-ring moves into an O-ring seat in the aperture cover plate. As the insert seats in the recess and is secured to the cover plate by means of screws protruding from the floor of the recess, a dovetail groove is formed which retains the O-ring.
    Type: Grant
    Filed: March 31, 1995
    Date of Patent: December 3, 1996
    Assignee: Applied Materials, Inc.
    Inventor: Fred Freerks