Abstract: A monolithic substrate for acceleration and angular rate sensing. The substrate comprises a support frame, and a first accelerometer formed in the substrate. The first accelerometer has a proof mass including first and second opposite edges. A flexure connects the first edge of the proof mass to the support frame. The flexure defines a hinge axis for the proof mass. The first accelerometer further includes a pair of torsion stabilizing struts coupling a portion of the proof mass to the frame.

Abstract: A non-gimballed angular rate sensor includes four spaced apart vibrating beams defining a pair of outer beams and a pair of inner beams. Each outer beam is mechanically coupled to an inner beam by way of an interconnecting member. The outer beams are excited to cause them to vibrate in the plane of the beams and 180 degrees out of phase with the inner beams. Since the outer vibrating beams are interconnected to the inner vibrating beams, only the outer vibrating beams are excited while the inner vibrating beams are used for sensing. In addition, an electrode pattern may be formed on a portion of the beams which compensates for any errors resulting from the geometric mismatch of the beams. By dimensionally optimizing the beams, the sinal strength of the sensor will be relatively greater than the signal strength of a gimballed device of a similar size, while not bandwidth limited like a gimballed device.