Patents by Inventor Fred Y. Clark

Fred Y. Clark has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for inspection sample preparation
    Patent number: 7112288
    Abstract: Methods are provided for delineating different layers and interfaces for inspection of a semiconductor wafer, wherein a sectioned portion of a wafer is subjected to a reactive ion etch process before inspection using a scanning electron microscope.
    Type: Grant
    Filed: August 13, 2002
    Date of Patent: September 26, 2006
    Assignee: Texas Instruments Incorporated
    Inventors: Fred Y. Clark, Andrew L. Vance, David G. Farber
  • Methods for inspection sample preparation
    Publication number: 20040033631
    Abstract: Methods are provided for delineating different layers and interfaces for inspection of a semiconductor wafer, wherein a sectioned portion of a wafer is subjected to a reactive ion etch process before inspection using a scanning electron microscope.
    Type: Application
    Filed: August 13, 2002
    Publication date: February 19, 2004
    Inventors: Fred Y. Clark, Andrew L. Vance, David G. Farber
  • Assembly and method for improved scanning electron microscope analysis of semiconductor devices
    Patent number: 6642518
    Abstract: An assembly and method for improved scanning electron microscope analysis of semiconductor devices include a structure including a first layer and a second layer, the second layer shrinking substantially when the structure is examined with a scanning electron microscope having a beam energy of at least 1.5 KeV, and at least part of the surface of the structure coated with a material composed of Iridium, wherein the coating is of sufficient thickness to reduce shrinkage of the second layer to approximately a predetermined amount when the structure is examined with a scanning electron microscope having a beam energy of at least 1.5 KeV.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: November 4, 2003
    Assignee: Texas Instruments Incorporated
    Inventors: Fred Y. Clark, James D. Krouse, Ping Jiang, Robyn R. Carlson