Patents by Inventor Frederic Poignant

Frederic Poignant has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9387447
    Abstract: The invention relates to a device for introducing a carrier gas and liquid compounds or a liquid solution into an evaporation chamber, comprising a mixing chamber, including at least:—a first inlet for the admission of said compounds or said solution,—a second inlet for the admission of the carrier gas,—and an outlet connected to an inlet of an injector, so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet, into the evaporation chamber.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: July 12, 2016
    Assignee: KEMSTREAM
    Inventors: Herve Guillon, Samuel Bonnafous, Jean Manuel Decams, Frederic Poignant
  • Publication number: 20140034751
    Abstract: The invention relates to a device for introducing a carrier gas and liquid compounds or a liquid solution into an evaporation chamber, comprising a mixing chamber, including at least:—a first inlet for the admission of said compounds or said solution,—a second inlet for the admission of the carrier gas,—and an outlet connected to an inlet of an injector, so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet, into the evaporation chamber.
    Type: Application
    Filed: October 11, 2013
    Publication date: February 6, 2014
    Applicant: Kemstream
    Inventors: Herve Guillon, Samuel Bonnafous, Jean Manuel Decams, Frederic Poignant
  • Patent number: 8584965
    Abstract: The invention relates to a device for introducing (1) a carrier gas (2) and liquid compounds (3) or a liquid solution into an evaporation chamber (4), comprising a mixing chamber (10), including at least: —a first inlet (8) for the admission of said compounds or said solution (3), —a second inlet (9) for the admission of the carrier gas (2), —and an outlet (13) connected to an inlet of an injector (14), so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet (14), into the evaporation chamber (4).
    Type: Grant
    Filed: April 18, 2007
    Date of Patent: November 19, 2013
    Assignee: Kemstream
    Inventors: Hervé Guillon, Samuel Bonnafous, Jean Manuel Decams, Frédéric Poignant
  • Publication number: 20100012027
    Abstract: A device for injecting into a chamber at least one precursor comprises at least one tank containing the precursor, means for keeping the tank at a higher pressure than that of the chamber, and at least one injector connected to the tank. It also comprises a device for measuring the mean flowrate, arranged between the tank and the injector and a mechanical low-pass filter arranged between the device for measuring the flowrate and the injector. The control circuit comprises outputs respectively connected to the tank and to the injector for controlling said pressure and/or the injection time and/or the injection frequency, in such a way as to periodically inject droplets of precursor into the chamber. The control circuit also comprises a regulation input connected to the output of the device for measuring the mean flowrate, in such a way as to control said pressure and/or the injection time and/or the injection frequency in order to keep the mean flowrate at a predetermined set-point.
    Type: Application
    Filed: August 5, 2005
    Publication date: January 21, 2010
    Applicant: QUALIFLOW-THERM
    Inventors: Frederic Poignant, Samuel Bonnafous, Jean-Manuel Decams, Herve Guillon
  • Publication number: 20090078791
    Abstract: The invention relates to a device for introducing (1) a carrier gas (2) and liquid compounds (3) or a liquid solution into an evaporation chamber (4), comprising a mixing chamber (10), including at least: —a first inlet (8) for the admission of said compounds or said solution (3), —a second inlet (9) for the admission of the carrier gas (2), —and an outlet (13) connected to an inlet of an injector (14), so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet (14), into the evaporation chamber (4).
    Type: Application
    Filed: April 18, 2007
    Publication date: March 26, 2009
    Applicant: KEMSTREAM
    Inventors: Herve Guillon, Samuel Bonnafous, Jean Manuel Decams, Frederic Poignant