Patents by Inventor Frederick Blumrich

Frederick Blumrich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR LOCALIZING DEFECTS ON SUBSTRATES
    Publication number: 20170115557
    Abstract: In a method for localizing defects on a substrate for EUV masks, a phase contrast optical unit having a phase mask is used for examining the substrate.
    Type: Application
    Filed: January 6, 2017
    Publication date: April 27, 2017
    Inventors: Jan Hendrik Peters, Frederick Blumrich, Dirk Seidel, Christoph Husemann