Patents by Inventor FREDERICK DAVID FISHBURN

FREDERICK DAVID FISHBURN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SHALLOW TRENCH ISOLATION IN DYNAMIC RANDOM ACCESS MEMORY AND MANUFACTURING METHOD THEREOF
    Publication number: 20130234280
    Abstract: A manufacturing method of STI in DRAM includes the following steps. Step 1 is providing a substrate and step 2 is forming at least one trench in the substrate. Step 3 is doping at least one of side portions and bottom portions of the trench with a dopant. Step 4 is forming an oxidation inside the trench and step 5 is providing a planarization step to remove the oxidation. The stress of the corners of STI is reduced so as to modify the defect of the substrate and improve the DRAM variability in retention time.
    Type: Application
    Filed: March 16, 2012
    Publication date: September 12, 2013
    Applicant: INOTERA MEMORIES, INC.
    Inventors: ARVIND KUMAR, ERIC LAHAUG, DEVESH KUMAR DATTA, KEEN WAH CHOW, CHIA MING YANG, CHIEN-CHI LEE, FREDERICK DAVID FISHBURN