Patents by Inventor Frederick Dyson

Frederick Dyson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5622747
    Abstract: A photoresist dispensing apparatus coats a wafer with potoresist to define a layer having substantially uniform thickness. The apparatus receives photoresist into a reservoir. The photoresist flows from the reservoir to a substantially planar channel formed between parallel plates. The photoresist flows between the plates towards an elongated straight-edge exit opening. The surface tension and the viscous forces of the photoresist causes a bead to form at the exit opening. By passing a wafer beneath the dispenser apparatus at the exit opening so as to contact the bead, the surface tension is broken. As a result, the photoresist flows onto the wafer. The wafer is moved under the dispenser on tracks which maintain the wafer substantially level. The pressure from the photoresist in the reservoir maintains a steady flow of photoresist as the wafer passes below the dispenser. Accordingly, a substantially uniform layer of photoresist is applied. Photoresist layers as thin as 20 microns have been achieved.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: April 22, 1997
    Assignee: National Semiconductor Corporation
    Inventors: Charles N. Todd, Frederick Dyson