Patents by Inventor Frederick G. Erie
Frederick G. Erie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7079556Abstract: A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.Type: GrantFiled: September 24, 2003Date of Patent: July 18, 2006Assignee: Cymer, Inc.Inventors: Igor V. Fomenkov, Armen Kroyan, Jesse D. Buck, Palash P. Das, Richard L. Sandstrom, Frederick G. Erie, John Martin Algots, Gamaralalage G. Padmabandu
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Patent number: 6721340Abstract: A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.Type: GrantFiled: June 30, 2000Date of Patent: April 13, 2004Assignee: Cymer, Inc.Inventors: Igor V. Fomenkov, Armen Kroyan, Jesse D. Buck, Palash P. Das, Richard L. Sandstrom, Frederick G. Erie, John M. Algots, Gamaralalage G. Padmabandu
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Publication number: 20040057474Abstract: A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.Type: ApplicationFiled: September 24, 2003Publication date: March 25, 2004Applicant: Cymer, Inc.Inventors: Igor V. Fomenkov, Armen Kroyan, Jesse D. Buck, Palash P. Das, Richard L. Sandstrom, Frederick G. Erie, John Martin Algots, Gamaralalage G. Padmabandu
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Patent number: 6621846Abstract: Electric discharge laser with active chirp correction. This application discloses techniques for moderating and dispensing these pressure waves. In some lasers small predictable patterns remain which can be substantially corrected with active wavelength control using relatively slow wavelength control instruments of the prior art. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Embodiments include stepper motors having very fine adjustments so that size of tuning steps are substantially reduced for more precise tuning. However, complete elimination of wavelength chirp is normally not feasible with structural changes in the laser chamber and advance tuning; therefore, Applicants have developed equipment and techniques for very fast active chirp correction. Improved techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver.Type: GrantFiled: February 9, 2000Date of Patent: September 16, 2003Assignee: Cymer, Inc.Inventors: Richard L. Sandstrom, Palash P. Das, George J. Everage, Frederick G. Erie, William N. Partlo, Igor V. Fomenkov
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Patent number: 6529531Abstract: Electric discharge laser with fast chirp correction. Fast wavelength chirp correction equipment includes at least one piezoelectric drive and a fast wavelength detection means and has a feedback response time of less than 1.0 millisecond. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.Type: GrantFiled: June 19, 2000Date of Patent: March 4, 2003Assignee: Cymer, Inc.Inventors: George J. Everage, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, Frederick G. Erie, John M. Algots
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Patent number: 6493374Abstract: A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controller by adjusting the curvature of a grating to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations on the back side of the grating at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.Type: GrantFiled: October 31, 2000Date of Patent: December 10, 2002Assignee: Cymer, Inc.Inventors: Igor V. Fomenkov, Frederick G. Erie, Jesse D. Buck, Palash P. Das
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Patent number: 6192064Abstract: A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an RMAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the RMAX mirror. In other preferred embodiments a separate laser beam reflected off the RMAX mirror on to a photodiode array is used to position the mirror.Type: GrantFiled: December 22, 1999Date of Patent: February 20, 2001Assignee: Cymer, Inc.Inventors: John M. Algots, Christopher A. Marchi, Frederick G. Erie, Jesse D. Buck, Alexander I. Ershov, Palash P. Das, Igor V. Fomenkov
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Patent number: 6094448Abstract: A bidirectional bandwidth controlled grating assembly. A spring housing is connected to one of two end plates extending away from the lined surface of the grating. An adjustment rod threaded through the other end plate extends into the spring housing. Inside the spring housing in a preferred embodiment are two compression springs mounted between pressure surfaces in the housing and a piston which is fixed on the adjustment rod. The lined surface of the grating can be made more concave (or less convex) by screwing the rod in a direction into the spring housing compressing one of the springs to push the end plates apart and the surface can be made more convex (or less concave) by screwing the rod in a direction out of the spring housing compressing the other spring to pull the end plates toward each other.Type: GrantFiled: February 11, 1999Date of Patent: July 25, 2000Assignee: Cymer, Inc.Inventors: Igor V. Fomenkov, Frederick G. Erie, Alexander I. Ershov