Patents by Inventor Frederick G. Plumb

Frederick G. Plumb has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation apparatus with improved post mass selection deceleration
    Patent number: 5747936
    Abstract: A controlled deceleration potential is provided in an ion implanter between the target and the flight tube through the mass selector, by means of a variable resistance comprising a series of HEXFETs. The series of HEXFETs conduct current absorbed by the substrate back to the flight tube so that a desired decelertion potential can be formed.
    Type: Grant
    Filed: November 25, 1996
    Date of Patent: May 5, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Bernard Harrison, Frederick G. Plumb