Patents by Inventor Frederick Hafner

Frederick Hafner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and method
    Publication number: 20070258080
    Abstract: According to one of the aspects of the present invention there is provided a substrate carrier arranged to hold a substrate in position using a vacuum, the vacuum being established in a sealed space created between the substrate carrier and the substrate.
    Type: Application
    Filed: May 5, 2006
    Publication date: November 8, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Enno Brink, Henricus Wilhelmus Van Buel, Joseph Consolini, Gerardus Johannes Keijsers, Klaus Simon, Johannes De Smit, Richard Travers, Maurice Anton Teuwen, Arnout Meester, Frederick Hafner, Vinyu Greenlee, Hubertus Antonius Baijens