Abstract: A method operable to remove contaminants from a contaminated fluid stream is provided. The process includes receiving the fluid stream containing contaminants. A first portion of the contaminants are removed from the fluid stream with a first scrubbing vessel. A first alkaline solution reacts with the contaminants such that the contaminants enter a contaminant solution. A remaining portion of the contaminants from the fluid stream is then removed with a at least one additional scrubbing vessel, wherein a second alkaline solution reacts with the contaminants such that part of the remaining portion of the contaminants enter a second solution. Water content is then removed from the fluid stream with a desiccating module, wherein the desiccating module outputs a clean fluid stream.

Abstract: A method operable to remove contaminants from a contaminated fluid stream is provided. The process includes receiving the fluid stream containing contaminants. A first portion of the contaminants are removed from the fluid stream with a first scrubbing vessel. A first base solution reacts with the contaminants such that the contaminants enter a contaminant solution. A remaining portion of the contaminants from the fluid stream is then removed with a at least one additional scrubbing vessel, wherein a second base solution reacts with the contaminants such that part of the remaining portion of the contaminants enter a second solution. Water content is then removed from the fluid stream with a desiccating module, wherein the desiccating module outputs a clean fluid stream.

Abstract: Molecular fluorine may be generated and distributed on-site at a fabrication facility. A molecular fluorine generator may come in a variety of sizes to fit better the needs of the particular fabrication facility. The generator may service one process tool, a plurality of process tool along a process bay, the entire fabrication facility, or nearly any other configuration within the facility. The process can obviate the need and inherent risks with transporting or handling gas cylinders. The process can be used in conjunction with a cleaning or fabrication operation used in the electronics fabrication industry.

Abstract: A method operable to remove contaminants from a contaminated fluid stream is provided. The process includes receiving the fluid stream containing contaminants. A first portion of the contaminants are removed from the fluid stream with a first scrubbing vessel. A first base solution reacts with the contaminants such that the contaminants enter a contaminant solution. A remaining portion of the contaminants from the fluid stream is then removed with a at least one additional scrubbing vessel, wherein a second base solution reacts with the contaminants such that part of the remaining portion of the contaminants enter a second solution. Water content is then removed from the fluid stream with a desiccating module, wherein the desiccating module outputs a clean fluid stream.

Abstract: Molecular fluorine may be generated and distributed on-site at a fabrication facility. A molecular fluorine generator may come in a variety of sizes to fit better the needs of the particular fabrication facility. The generator may service one process tool, a plurality of process tool along a process bay, the entire fabrication facility, or nearly any other configuration within the facility. The process can obviate the need and inherent risks with transporting or handling gas cylinders. The process can be used in conjunction with a cleaning or fabrication operation used in the electronics fabrication industry.

Abstract: A system for generating a molecular halogen gas using gas generation modules can provide a flexible platform for scaling to meet increasing demands within a facility. During normal operation, the system may be designed to have one gas generation module in standby mode while the others are in active mode. Adding or removing gas generation cells is relatively straightforward and does not require redesigning the system. The system can be designed with a level of redundancy that best fits the user's needs to allow for continuous uninterruptible operations. The system can be safer to use compared to other systems due to any one or more of electrolytic cell-rectifier pairs, individually exhausted cabinets, organization fluid flow paths and pressures, and the like.

Abstract: Molecular fluorine may be generated and distributed on-site at a fabrication facility. A molecular fluorine generator may come in a variety of sizes to fit better the needs of the particular fabrication facility. The generator may service one process tool, a plurality of process tool along a process bay, the entire fabrication facility, or nearly any other configuration within the facility. The process can obviate the need and inherent risks with transporting or handling gas cylinders. The process can be used in conjunction with a cleaning or fabrication operation used in the electronics fabrication industry.

Abstract: An system and method for on-site generation and distribution of fluorine for semiconductor processes are disclosed. In one aspect, a system for providing fluorine in association with a fabrication process includes a fluorine generator operable to provide fluorine having a concentration and a distributor operable to transfer a volume of fluorine to a selective processing tool. A disclosed method for providing fluorine for a fabrication process includes generating fluorine at a location associated with a process tool and distributing the fluorine to the process tool to be used in association with the fabrication process.