Patents by Inventor Frederick M. Rovente

Frederick M. Rovente has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and structure for preventing wet etchant penetration at the interface between a resist mask and an underlying metal layer
    Patent number: 4971894
    Abstract: A method and structure which will prevent wet etchant penetration at the interface region of a masked metal layer during etching of an exposed portion of the metal adjacent thereto is provided. The metal is provided with a matte finish of 0.1 and 0.5 mils peak to valley. The metal is covered with a dry film photoresist material which has been plasticized to have a surface deflection of at least 0.5 mils without losing its plasticity and conforms to the surface pattern of the metal. The photoresist is imagewise patterned and developed, and the exposed or revealed regions of the metal are subject to a wet etching process. The conformed coating of the resist prevents wet etchant penetration.
    Type: Grant
    Filed: February 13, 1989
    Date of Patent: November 20, 1990
    Assignee: International Business Machines Corporation
    Inventors: Irving Memis, Frederick M. Rovente