Patents by Inventor Frederick McNeil

Frederick McNeil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Target designs and related methods for enhanced cooling and reduced deflection and deformation
    Publication number: 20070141857
    Abstract: A sputtering target is described herein that comprises: a) a target surface component comprising a target material; b) a core backing component having a coupling surface and a back surface, wherein the coupling surface is coupled to the target surface component; and c) at least one surface area feature coupled to or located in the back surface of the core backing component, wherein the surface area feature increases the effective surface area of the core backing component. Additional sputtering targets comprises: a) an integrated target surface component and core backing component, wherein the surface component and the backing component comprise the same target material or a material gradient; and b) at least one surface area feature that is on or integrated into the core backing component, wherein the surface area feature increases the effective component of the core backing component.
    Type: Application
    Filed: October 24, 2003
    Publication date: June 21, 2007
    Inventors: Susan Strothers, Werner Hort, Frederick McNeil